Patent Assignment
Reel/Frame 025726/0616
Assignment of Assignor's Interest
Recorded: 2011-02-01
Pages: 7
Assignors
IZIKSON, PAVEL
Executed: 2011-01-29
KANDEL, DANIEL
Executed: 2011-02-01
ROBINSON, JOHN
Executed: 2011-01-31
Assignee
KLA-TENCOR CORPORATION
ONE TECHNOLOGY DRIVE, MILPITAS, CALIFORNIA, 95035
Covered Property
(1)
Method and System for Providing Process Tool Correctables Using an Optimized Sampling Scheme with Smart Interpolation