Patent Assignment
Reel/Frame 025736/0987
Assignment of Assignor's Interest
Recorded: 2011-02-03
Pages: 4
Assignors
TADOKORO, MASAHIDE
Executed: 2011-01-04
KONDO, YOSHIHIRO
Executed: 2011-01-04
SAITO, TAKASHI
Executed: 2011-01-04
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU,, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Heating Device, Coating/Developing System, Heating Method, Coating/Developing Method, and Recording Medium Having Program for Executing Heating Method or Coating/Developing Method