Patent Assignment
Reel/Frame 025737/0075
Assignment of Assignor's Interest
Recorded: 2011-02-03
Pages: 4
Assignors
LIU, ZHENDONG
Executed: 2010-09-22
GUO, YI
Executed: 2010-09-22
REDDY, ARUN
Executed: 2010-09-22
ZHANG, GUANGYUN
Executed: 2010-09-21
Assignee
ROHM AND HAAS ELECTRONIC MATERIALS CMP HOLDINGS, INC.
451 BELLEVUE ROAD, NEWARK, DELAWARE, 19713
Covered Property
(1)
Slurry Composition Having Tunable Dielectric Polishing Selectivity and Method of Polishing a Substrate