Patent Assignment
Reel/Frame 025739/0083
Assignment of Assignor's Interest
Recorded: 2011-02-03
Pages: 4
Assignors
OKORN-SCHMIDT, HARALD
Executed: 2011-01-20
KUMNIG, FRANZ
Executed: 2011-01-18
OBWEGER, RAINER
Executed: 2011-01-19
WIRNSBERGER, THOMAS
Executed: 2011-01-18
Assignee
LAM RESEARCH AG
SEZ STRASSE 1, VILLACH, A-9500, AUSTRIA
Covered Property
(1)
Method and Apparatus for Surface Treatment Using Inorganic Acid and Ozone