Patent Assignment
Reel/Frame 025742/0735
Assignment of Assignor's Interest
Recorded: 2011-02-03
Pages: 3
Assignors
VARADARAJAN, BHADRI N.
Executed: 2010-12-20
MCLAUGHLIN, KEVIN M.
Executed: 2010-12-28
VAN SCHRAVENDIJK, BART
Executed: 2011-01-12
Assignee
NOVELLUS SYSTEMS, INC.
4000 NORTH FIRST STREET, SAN JOSE, CALIFORNIA, 95134
Covered Property
(1)
Carbon Containing Low-K Dielectric Constant Recovery Using Uv Treatment