Patent Assignment
Reel/Frame 025760/0001
Assignment of Assignor's Interest
Recorded: 2011-02-08
Pages: 5
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Gas Shower Structure and Substrate Processing Apparatus