Patent Assignment
Reel/Frame 025766/0522
Assignment of Assignor's Interest
Recorded: 2011-01-11
Pages: 5
Assignors
SHERO, ERIC
Executed: 2010-11-09
RAISANEN, PETRI
Executed: 2010-11-05
JUNG, SUNG HOON
Executed: 2010-11-04
WANG, CHANG-GONG
Executed: 2010-11-17
Assignee
ASM AMERICA, INC.
3440 E. UNIVERSITY DRIVE, PHOENIX, ARIZONA, 85034
Covered Property
(1)
Systems and Methods for Thin-Film Deposition of Metal Oxides Using Excited Nitrogen-Oxygen Species
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.