Patent Assignment
Reel/Frame 025778/0633
Assignment of Assignor's Interest
Recorded: 2011-02-09
Pages: 5
Assignors
STAALS, FRANK
Executed: 2011-01-17
VAN DER LAAN, HANS
Executed: 2011-01-11
BUTLER, HANS
Executed: 2011-01-10
HOFMANS, GERARDUS CAROLUS JOHANNUS
Executed: 2011-01-10
MAGNUSSON, SVEN GUNNAR KRISTER
Executed: 2011-01-06
Assignee
ASML NETHERLANDS B.V.
DE RUN 6501, VELDHOVEN, NL-5504 DR, NETHERLANDS
Covered Property
(1)
Method of Measuring Properties of Dynamic Positioning Errors in a Lithographic Apparatus, Data Processing Apparatus, and Computer Program Product