Patent Assignment
Reel/Frame 025785/0396
Assignment of Assignor's Interest
Recorded: 2011-02-09
Pages: 9
Assignors
KAERTNER, FRANZ X.
Executed: 2011-02-04
FALCAO-FILHO, EDILSON L.
Executed: 2010-12-30
LAI, CHIEN-JEN
Executed: 2011-02-04
HONG, KYUNG-HAN
Executed: 2011-02-04
FAN, TSO YEE
Executed: 2011-01-14
Assignee
MASSACHUSETTS INSTITUTE OF TECHNOLOGY
77 MASSACHUSETTS AVENUE, CAMBRIDGE, MASSACHUSETTS, 02139
Covered Property
(1)
Efficient High-Harmonic-Generation-Based Euv Source Driven by Short Wavelength Light
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.