Patent Assignment
Reel/Frame 025785/0585
Assignment of Assignor's Interest
Recorded: 2011-02-10
Pages: 5
Assignors
FAGUET, JACQUES
Executed: 2011-02-03
IWASAKI, MASAHIDE
Executed: 2010-11-29
NOZAWA, TOSHIHISA
Executed: 2010-12-17
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Method and System for Performing Different Deposition Processes Within a Single Chamber