Patent Assignment
Reel/Frame 025795/0037
Assignment of Assignor's Interest
Recorded: 2011-02-11
Pages: 4
Assignors
CARCASI, MICHAEL A.
Executed: 2010-03-31
RATHSACK, BENJAMIN M.
Executed: 2010-03-31
SOMERVELL, MARK H.
Executed: 2010-03-31
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME MINATO-KU, AKASAKA BIZ TOWER, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Method of Slimming Radiation-Sensitive Material Lines in Lithographic Applications