Patent Assignment
Reel/Frame 025804/0389
Assignment of Assignor's Interest
Recorded: 2011-02-14
Pages: 2
Assignor
HAO, JENNIFER FANGLI
Executed: 2010-12-03
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Polar Regions for Electrostatic De-Chucking with Lift Pins