Patent Assignment
Reel/Frame 025811/0682
Assignment of Assignor's Interest
Recorded: 2011-02-15
Pages: 4
Assignors
GRUNER, TORALF
Executed: 2007-08-27
EPPLE, ALEXANDER
Executed: 2007-08-20
DEGUENTHER, MARKUS
Executed: 2007-08-27
Assignee
CARL ZEISS SMT AG
RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMAN DEMOCRATIC REPUBLIC
Covered Property
(1)
Microlithographic Projection Exposure Apparatus
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.