Patent Assignment
Reel/Frame 025815/0570
Assignment of Assignor's Interest
Recorded: 2011-02-16
Pages: 3
Assignors
LEE, WILLIAM D.
Executed: 2011-02-15
FARLEY, MARVIN
Executed: 2011-02-15
DIVERGILIO, WILLIAM
Executed: 2011-02-15
Assignee
AXCELIS TECHNOLOGIES, INC.
108 CHERRY HILL DRIVE, BEVERLY, MASSACHUSETTS, 01915-1053
Covered Property
(1)
Post Implant Wafer Heating Using Light
Application:
12/944,407 →
Publication:
US 2011/0291022
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.