Patent Assignment
Reel/Frame 025815/0709
Assignment of Assignor's Interest
Recorded: 2011-02-16
Pages: 5
Assignors
YAMAZAWA, YOHEI
Executed: 2011-01-21
MATSUMOTO, NAOKI
Executed: 2011-02-04
IWASAKI, MASAHIDE
Executed: 2011-02-04
OKUNISHI, NAOHIKO
Executed: 2011-01-31
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Plasma Processing Apparatus