Patent Assignment
Reel/Frame 025816/0673
Assignment of Assignor's Interest
Recorded: 2011-02-16
Pages: 2
Assignor
ASAI, MASAYUKI
Executed: 2010-09-09
Assignee
HITACHI KOKUSAI ELECTRIC, INC.
14-1 SOTOKANDA 4-CHOME,, CHIYODA-KU, TOKYO, 1018980, JAPAN
Covered Property
(1)
Method of Manufacturing Semiconductor Device and Substrate Processing Apparatus
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.