Patent Assignment
Reel/Frame 025861/0682
Assignment of Assignor's Interest
Recorded: 2011-02-24
Pages: 6
Assignors
BANINE, VADIM YEVGENYEVICH
Executed: 2011-01-20
SJMAENOK, LEONID AIZIKOVITCH
Executed: 2011-02-10
YAKUNIN, ANDREI MIKHAILOVICH
Executed: 2011-02-23
Assignee
ASML NETHERLANDS B.V.
DE RUN 6501, VELDHOVEN, NL - 5504 DR, NETHERLANDS
Covered Property
(1)
Mirror, Lithographic Apparatus and Device Manufacturing Method