Patent Assignment
Reel/Frame 025861/0698
Assignment of Assignor's Interest
Recorded: 2011-02-24
Pages: 3
Assignor
MIDDLEBROOKS, SCOTT ANDERSON
Executed: 2011-02-14
Assignee
ASML NETHERLANDS B.V.
DE RUN 6501, VELDHOVEN, NL - 5504 DR, NETHERLANDS
Covered Property
(1)
Method and Apparatus for Estimating Model Parameters of and Controlling a Lithographic Apparatus by Measuring a Substrate Property and Using a Polynomial Model