Patent Assignment
Reel/Frame 025862/0035
Assignment of Assignor's Interest
Recorded: 2011-02-25
Pages: 4
Assignors
HONDA, TATSUYA
Executed: 2011-02-09
OMATA, TAKATSUGU
Executed: 2011-02-09
NONAKA, YUSUKE
Executed: 2011-02-09
Assignee
SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
398, HASE, ATSUGI-SHI, KANAGAWA-KEN, 243-0036, JAPAN
Covered Property
(1)
Manufacturing Method of Oxide Semiconductor Film and Manufacturing Method of Transistor