Patent Assignment
Reel/Frame 025863/0914
Assignment of Assignor's Interest
Recorded: 2011-02-25
Pages: 3
Assignor
DEN BOEF, ARIE JEFFREY
Executed: 2009-03-16
Assignee
ASML NETHERLANDS B.V.
DE RUN 6501, VELDHOVEN, NL - 5504 DR, NETHERLANDS
Covered Property
(1)
Overlay Measurement Apparatus, Lithographic Apparatus and Device Manufacturing Method Using Such Overlay Measurement Apparatus