Patent Assignment
Reel/Frame 025864/0216
Assignment of Assignor's Interest
Recorded: 2011-02-25
Pages: 3
Assignors
MENCHTCHIKOV, BORIS
Executed: 2011-02-10
PADIY, ALEXANDER VIKTOROVYCH
Executed: 2011-02-10
Assignee
ASML NETHERLANDS B.V.
DE RUN 6501, VELDHOVEN, NL - 5504 DR, NETHERLANDS
Covered Property
(1)
Method and Apparatus for Controlling a Lithographic Apparatus