Patent Assignment
Reel/Frame 025904/0397
Assignment of Assignor's Interest
Recorded: 2011-03-04
Pages: 3
Assignor
MORITA, OSAMU
Executed: 2011-01-12
Assignee
HITACHI KOKUSAI ELECTRIC INC.
14-1, SOTOKANDA 4-CHOME, CHIYODA-KU, TOKYO, 1018980, JAPAN
Covered Property
(1)
Substrate Processing Apparatus, Method of Displaying Error of Substrate Processing Apparatus and Transfer Control Method
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.