IP Library › Assignment 047995/0490
Patent Assignment
Reel/Frame 047995/0490

Assignment of Assignor's Interest

Recorded: 2018-12-31 Pages: 18
Assignor
HITACHI KOKUSAI ELECTRIC INC.
Executed: 2018-12-05
Assignee
KOKUSAI ELECTRIC CORPORATION
3-4, KANDAKAJI-CHO, CHIYODA-KU, TOKYO, 101-0045, JAPAN
Covered Properties (241)
Method of Forming an Insulation Film Having Low Impurity Concentrations
Patent: 8,367,557 →
Application: 12/607,223 →
Publication: US 2010/0105192
Method of Manufacturing Semiconductor Device, Method of Processing Substrate, and Substrate Processing Apparatus
Patent: 8,252,701 →
Application: 12/949,256 →
Publication: US 2011/0130011
Method of Manufacturing Semiconductor Device, Method of Processing Substrate, and Substrate Processing Apparatus
Patent: 8,202,809 →
Application: 12/950,340 →
Publication: US 2011/0124204
Substrate Processing Apparatus and Method of Manufacturing Semiconductor Device
Patent: 9,305,820 →
Application: 12/964,921 →
Publication: US 2011/0139070
Method of Manufacturing Semiconductor Device, Method of Processing Substrate and Substrate Processing Apparatus
Patent: 8,728,935 →
Application: 12/974,884 →
Publication: US 2011/0151660
Substrate Processing Apparatus, Method of Displaying Error of Substrate Processing Apparatus and Transfer Control Method
Patent: 8,473,095 →
Application: 12/976,108 →
Publication: US 2011/0160900
Substrate Processing Apparatus and Method of Manufacturing Semiconductor Device
Patent: 8,876,453 →
Application: 13/004,495 →
Publication: US 2011/0170989
Method of Manufacturing Semiconductor Device and Substrate Processing Apparatus
Patent: 8,691,708 →
Application: 13/012,320 →
Publication: US 2011/0183519
Substrate Processing Apparatus and Method of Manufacturing Semiconductor Device
Patent: 8,808,455 →
Application: 13/014,419 →
Publication: US 2011/0186984
Heat Treatment Apparatus and Method of Manufacturing Semiconductor Device
Patent: 8,734,148 →
Application: 13/033,974 →
Publication: US 2011/0207339
Substrate Processing Apparatus
Patent: 8,588,950 →
Application: 13/036,485 →
Publication: US 2011/0218659
Method of Manufacturing Semiconductor Device, Method of Processing Substrate, and Substrate Processing Apparatus
Patent: 8,410,001 →
Application: 13/047,367 →
Publication: US 2011/0230057
Method of Manufacturing Semiconductor Device, Method of Processing Substrate and Substrate Processing Apparatus
Patent: 8,546,272 →
Application: 13/083,022 →
Publication: US 2011/0256733
Substrate Processing Apparatus, Method of Manufacturing Semiconductor Device and Method of Cleaning Processing Vessel
Patent: 8,679,259 →
Application: 13/089,988 →
Publication: US 2011/0259370
Heater Supporting Device
Patent: 9,779,970 →
Application: 13/101,625 →
Publication: US 2011/0281226
Method of Manufacturing a Semiconductor Device, Method of Cleaning a Process Vessel, and Substrate Processing Apparatus
Patent: 8,673,790 →
Application: 13/155,997 →
Publication: US 2011/0318937
Substrate Processing Apparatus
Patent: 9,698,037 →
Application: 13/156,925 →
Publication: US 2011/0305543
Substrate Processing Apparatus and Method of Manufacturing Semiconductor Device
Patent: 9,028,191 →
Application: 13/163,165 →
Publication: US 2011/0311339
Method of Manufacturing Semiconductor Device, Method of Processing Substrate, and Substrate Processing Apparatus
Patent: 8,410,003 →
Application: 13/168,600 →
Publication: US 2011/0318940
Statistical Analysis Method and Substrate Process System
Patent: 9,142,436 →
Application: 13/175,132 →
Publication: US 2012/0010743
Substrate Processing Apparatus and Heating Equipment
Patent: 9,460,946 →
Application: 13/177,306 →
Publication: US 2012/0006506
Method of Manufacturing a Semiconductor Device and Substrate Processing Apparatus
Patent: 8,497,192 →
Application: 13/178,232 →
Publication: US 2012/0009764
Substrate Processing Apparatus Capable of Switching Control Mode of Heater
Patent: 9,418,881 →
Application: 13/192,784 →
Publication: US 2012/0094010
Substrate Processing System, Substrate Processing Apparatus and Display Method of Substrate Processing Apparatus
Patent: 8,948,899 →
Application: 13/211,105 →
Publication: US 2012/0065763
Method of Manufacturing Semiconductor Device and Method of Processing Substrate
Patent: 9,218,993 →
Application: 13/213,434 →
Publication: US 2012/0045903
Method of Manufacturing Semiconductor Device and Substrate Processing Apparatus
Patent: 9,096,928 →
Application: 13/227,312 →
Publication: US 2012/0064733
Substrate Processing Apparatus and Method of Manufacturing Semiconductor Device
Patent: 9,222,732 →
Application: 13/229,543 →
Publication: US 2012/0067869
Substrate Processing Apparatus and Method of Manufacturing a Semiconductor Device
Patent: 8,486,222 →
Application: 13/239,902 →
Publication: US 2012/0108080
Substrate Processing Apparatus and Method of Manufacturing a Semiconductor Device
Patent: 8,557,720 →
Application: 13/242,690 →
Publication: US 2012/0108061
Semiconductor Device Manufacturing Method, Substrate Processing Apparatus and Semiconductor Device
Patent: 8,866,271 →
Application: 13/250,708 →
Publication: US 2012/0086107
Substrate Processing Apparatus, Method of Manufacturing Semiconductor Device and Semiconductor Device
Patent: 9,496,134 →
Application: 13/289,450 →
Publication: US 2012/0119337
Method of Manufacturing Semiconductor Device, Semiconductor Device and Substrate Processing Apparatus
Patent: 8,847,343 →
Application: 13/293,636 →
Publication: US 2012/0126355
Substrate Processing Apparatus, Method of Manufacturing Semiconductor Device, and Baffle Structure of the Substrate Processing Apparatus
Patent: 9,911,580 →
Application: 13/306,277 →
Publication: US 2012/0132228
Method of Manufacturing Semiconductor Device, Method of Processing Substrate Substrate Processing Apparatus and Non-Transitory Computer-Readable Recording Medium
Patent: 9,378,943 →
Application: 13/345,885 →
Publication: US 2012/0184110
Method of Forming Metal-Containing Film
Patent: 9,045,825 →
Application: 13/398,523 →
Publication: US 2012/0214300
Method of Manufacturing Semiconductor Device and Method of Processing Substrate and Substrate Processing Apparatus
Patent: 8,575,042 →
Application: 13/405,750 →
Publication: US 2012/0220137
Substrate Supporting Table, Substrate Processing Apparatus, and Manufacture Method for Semiconductor Device
Patent: 9,786,528 →
Application: 13/407,091 →
Publication: US 2012/0222818
Substrate Processing Apparatus and a Method of Manufacturing a Semiconductor Device
Patent: 9,236,246 →
Application: 13/409,783 →
Publication: US 2012/0225566
Apparatus, Method, and Computer-Readable Medium for Managing Abnormality Data Measured in the Substrate Manufacturing Process
Patent: 9,581,996 →
Application: 13/433,713 →
Publication: US 2012/0253724
Substrate Processing Apparatus, Program for Controlling the Same, and Method for Fabricating Semiconductor Device
Patent: 9,443,748 →
Application: 13/435,284 →
Publication: US 2012/0258570
Method of Manufacturing Semiconductor Device and Substrate Processing Apparatus
Patent: 9,039,838 →
Application: 13/553,968 →
Publication: US 2013/0019804
Method of Manufacturing Semiconductor Device, Method of Manufacturing Substrate and Substrate Processing Apparatus
Patent: 8,889,533 →
Application: 13/580,933 →
Publication: US 2012/0315767
Method of Manufacturing Semiconductor Device, Method of Processing Substrate, Substrate Processing Apparatus and Computer-Readable Recording Medium
Patent: 8,951,912 →
Application: 13/616,148 →
Publication: US 2013/0065391
Cleaning Method, Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus and Recording Medium
Patent: 8,741,783 →
Application: 13/616,872 →
Publication: US 2013/0065402
Method of Manufacturing Semiconductor Device and Substrate Processing Apparataus
Patent: 8,809,204 →
Application: 13/666,272 →
Publication: US 2013/0059451
Method of Manufacturing Semiconductor Device, Method of Processing Substrate, Substrate Processing Apparatus and Non-Transitory Computer-Readable Recording Medium
Patent: 8,987,146 →
Application: 13/788,122 →
Publication: US 2013/0237064
Method of Manufacturing Semiconductor Device, Method of Processing Substrate, Substrate Processing Apparatus and Non-Transitory Computer-Readable Recording Medium
Patent: 9,245,745 →
Application: 13/796,258 →
Publication: US 2013/0273747
Semiconductor Device Manufacturing Method, Substrate Processing Apparatus, and Non-Transitory Recording Medium
Patent: 9,257,271 →
Application: 13/826,599 →
Publication: US 2013/0252433
Method of Manufacturing Semiconductor Device, Method of Processing Substrate, Substrate Processing Apparatus, and Recording Medium
Patent: 9,685,317 →
Application: 13/838,209 →
Publication: US 2013/0252434
Method of Manufacturing Semiconductor Device, Method of Processing Substrate, Substrate Processing Apparatus, and Recording Medium
Patent: 9,177,786 →
Application: 13/845,781 →
Publication: US 2013/0252437
Method of Manufacturing Semiconductor Device, Method of Processing Substrate, Substrate Processing Apparatus and Non-Transitory Computer-Readable Recording Medium
Patent: 9,218,959 →
Application: 13/847,018 →
Publication: US 2013/0252435
Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus, and Recording Medium
Patent: 8,728,954 →
Application: 13/963,027 →
Publication: US 2014/0051260
Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus, and Recording Medium
Patent: 8,785,333 →
Application: 13/973,714 →
Publication: US 2014/0057452
Method of Manufacturing Semiconductor Device
Patent: 9,431,240 →
Application: 14/021,239 →
Publication: US 2014/0073142
Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus, and Recording Medium
Patent: 9,472,397 →
Application: 14/022,800 →
Publication: US 2014/0080321
Substrate Processing Apparatus, Method of Manufacturing Semiconductor Device, and Method of Generating Recipe
Patent: 9,690,879 →
Application: 14/022,860 →
Publication: US 2014/0074277
Method of Manufacturing a Siocn Film, Substrate Processing Apparatus, and Recording Medium
Patent: 9,263,253 →
Application: 14/026,238 →
Publication: US 2014/0080314
Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus, and Recording Medium
Patent: 9,218,955 →
Application: 14/027,799 →
Publication: US 2014/0080319
Method of Cleaning, Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus, and Recording Medium
Patent: 9,653,326 →
Application: 14/030,342 →
Publication: US 2014/0087568
Method of Manufacturing Semiconductor Device, Method of Processing Substrate and Substrate Processing Apparatus
Patent: 8,946,092 →
Application: 14/036,568 →
Publication: US 2014/0024225
Substrate Processing Apparatus, Purging Apparatus, Method of Manufacturing Semiconductor Device, and Recording Medium
Patent: 9,695,509 →
Application: 14/041,447 →
Publication: US 2014/0112739
Method of Manufacturing Semiconductor Device and Method of Processing Substrate and Substrate Processing Apparatus
Patent: 9,349,587 →
Application: 14/044,358 →
Publication: US 2014/0038429
Method of Controlling Substrate Processing Apparatus, Maintenance Method of Substrate Processing Apparatus and Transfer Method Performed in Substrate Processing Apparatus
Patent: 8,972,036 →
Application: 14/056,374 →
Publication: US 2014/0046470
Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus, and Non-Transitory Computer-Readable Recording Medium
Patent: 9,443,718 →
Application: 14/102,682 →
Publication: US 2014/0170858
Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus, and Non-Transitory Computer-Readable Recording Medium
Patent: 9,093,270 →
Application: 14/138,776 →
Publication: US 2014/0179085
Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus, and Recording Medium
Patent: 9,425,075 →
Application: 14/168,678 →
Publication: US 2014/0220788
Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus, and Recording Medium
Patent: 9,257,275 →
Application: 14/175,463 →
Publication: US 2014/0227886
Method of Manufacturing Semiconductor Device and Method of Cleaning Processing Vessel
Patent: 9,683,288 →
Application: 14/184,051 →
Publication: US 2014/0235066
Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus, and Recording Medium
Patent: 9,704,703 →
Application: 14/187,733 →
Publication: US 2014/0242809
Method of Manufacturing Semiconductor Device
Patent: 9,059,089 →
Application: 14/187,799 →
Publication: US 2014/0242790
Method of Manufacturing Semiconductor Device, Method of Processing Substrate, Substrate Processing Apparatus and Computer-Readable Recording Medium
Patent: 9,012,323 →
Application: 14/190,574 →
Publication: US 2014/0179086
Cleaning Method, Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus and Recording Medium
Patent: 9,540,727 →
Application: 14/192,165 →
Publication: US 2014/0248783
Film Forming Method and Recording Medium for Performing the Method
Patent: 9,190,298 →
Application: 14/195,444 →
Publication: US 2014/0256156
Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus, and Recording Medium
Patent: 9,234,277 →
Application: 14/197,920 →
Publication: US 2014/0273507
Cleaning Method, Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus and Non-Transitory Computer-Readable Recording Medium
Patent: 9,401,272 →
Application: 14/223,132 →
Publication: US 2014/0287594
Insulation Structure and Method of Manufacturing Semiconductor Device
Patent: 9,587,884 →
Application: 14/223,367 →
Publication: US 2014/0287375
Method of Manufacturing Semiconductor Device
Patent: 9,437,426 →
Application: 14/227,360 →
Publication: US 2014/0295648
Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus, and Recording Medium
Patent: 9,793,107 →
Application: 14/227,809 →
Publication: US 2015/0072537
Substrate Processing Apparatus and Method of Manufacturing Semiconductor Device
Patent: 8,986,450 →
Application: 14/229,151 →
Substrate Processing Apparatus and Method of Manufacturing Semiconductor Device
Patent: 8,925,562 →
Application: 14/229,284 →
Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus, and Recording Medium
Patent: 9,552,980 →
Application: 14/230,310 →
Publication: US 2014/0315393
Cleaning Method, Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus, and Recording Medium
Patent: 9,865,451 →
Application: 14/230,356 →
Publication: US 2015/0000695
Semiconductor Device Manufacturing Method
Patent: 9,472,391 →
Application: 14/230,416 →
Publication: US 2014/0349492
Substrate Processing Apparatus and Method of Manufacturing Semiconductor Device
Patent: 9,018,689 →
Application: 14/230,513 →
Method of Manufacturing Semiconductor Device, Semiconductor Device and Substrate Processing Apparatus
Patent: 9,123,531 →
Application: 14/248,961 →
Publication: US 2014/0220789
Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus, and Recording Medium
Patent: 8,951,919 →
Application: 14/251,243 →
Publication: US 2014/0220787
Method of Manufacturing a Thin Film Having a High Tolerance to Etching and Non-Transitory Computer-Readable Recording Medium
Patent: 9,412,584 →
Application: 14/274,411 →
Publication: US 2014/0335701
Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus and Non-Transitory Computer-Readable Recording Medium
Patent: 9,449,813 →
Application: 14/305,364 →
Publication: US 2014/0370692
Substrate Processing System, Substrate Processing Apparatus and Method for Accumulating Data for Substrate Processing Apparatus
Patent: 9,720,407 →
Application: 14/309,460 →
Publication: US 2014/0303769
Substrate Processing Apparatus for Managing Transfer State of Substrate Gas Storage Container Based on Supply Flow Rate
Patent: 9,960,065 →
Application: 14/318,333 →
Publication: US 2015/0000591
Substrate Processing Apparatus
Patent: 9,011,601 →
Application: 14/329,355 →
Publication: US 2014/0318451
Substrate Processing System, Management Device, and Display Method for Facilitating Trouble Analysis
Patent: 9,823,652 →
Application: 14/380,586 →
Publication: US 2015/0039116
Method for Manufacturing Semiconductor Device, Method for Processing Substrate, Substrate Processing Device and Recording Medium
Patent: 9,502,233 →
Application: 14/386,223 →
Publication: US 2015/0099373
Semiconductor Device Manufacturing Method and Substrate Processing Method Including a Cleaning Method
Patent: 9,546,422 →
Application: 14/387,978 →
Publication: US 2015/0050815
Method of Manufacturing Semiconductor Device, Method of Processing Substrate, Substrate Processing Apparatus, and Program
Patent: 9,514,935 →
Application: 14/388,160 →
Publication: US 2015/0044880
Substrate Processing Apparatus, Method of Processing Substrate, and Method of Manufacturing Semiconductor Device
Patent: 9,548,229 →
Application: 14/431,678 →
Publication: US 2015/0279712
Substrate processing apparatus
Patent: 9,396,930 →
Application: 14/432,668 →
Publication: US 2015/0294860
Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus, and Recording Medium
Patent: 9,732,426 →
Application: 14/452,857 →
Publication: US 2015/0044881
Substrate Processing Apparatus, Semiconductor Device Manufacturing Method, Substrate Processing Method, and Recording Medium
Patent: 9,543,220 →
Application: 14/476,337 →
Publication: US 2014/0370628
Atomic Layer Deposition Processing Apparatus to Reduce Heat Energy Conduction
Patent: 9,518,321 →
Application: 14/483,619 →
Publication: US 2016/0032457
Substrate Processing Apparatus, Method of Manufacturing Semiconductor Device and Method of Processing Substrate
Patent: 9,695,511 →
Application: 14/490,239 →
Publication: US 2015/0093909
Substrate Processing Apparatus, Method of Manufacturing Semiconductor Device and Non-Transitory Computer-Readable Recording Medium
Patent: 9,028,648 →
Application: 14/493,828 →
Substrate Processing Apparatus, Non-Transitory Computer-Readable Recording Medium Thereof and Semiconductor Manufacturing Method by Employing Thereof
Patent: 9,353,438 →
Application: 14/494,085 →
Publication: US 2015/0292082
Method of Manufacturing Semiconductor Device by Alternatively Increasing and Decreasing Pressure of Process Chamber
Patent: 9,508,531 →
Application: 14/495,226 →
Publication: US 2015/0087159
Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus, and Recording Medium
Patent: 9,070,554 →
Application: 14/495,388 →
Publication: US 2015/0093913
Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus, and Recording Medium
Patent: 9,583,338 →
Application: 14/496,660 →
Publication: US 2015/0111395
Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus, and Non-Transitory Computer-Readable Recording Medium
Patent: 9,187,826 →
Application: 14/499,952 →
Publication: US 2015/0093911
Substrate Processing Apparatus and Method of Manufacturing Semiconductor Device
Patent: 9,659,767 →
Application: 14/500,338 →
Publication: US 2015/0214044
Method of Manufacturing Semiconductor Device and Substrate Processing Apparatus
Patent: 9,966,268 →
Application: 14/501,606 →
Publication: US 2015/0111378
Substrate Processing Apparatus, Method of Manufacturing Semiconductor Device and Non-Transitory Computer Readable Recording Medium
Patent: 9,062,376 →
Application: 14/502,044 →
Publication: US 2015/0152554
Substrate Processing Apparatus, Method of Manufacturing Semiconductor Device and Non-Transitory Computer-Readable Recording Medium
Patent: 9,587,314 →
Application: 14/551,900 →
Publication: US 2015/0155201
Method of Manufacturing Semiconductor Device
Patent: 9,508,546 →
Application: 14/566,989 →
Publication: US 2015/0221503
Film Forming Method and Recording Medium for Performing the Method
Patent: 9,281,181 →
Application: 14/582,646 →
Publication: US 2015/0187559
Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus, and Recording Medium
Patent: 9,816,181 →
Application: 14/591,544 →
Publication: US 2015/0200085
Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus, and Recording Medium
Patent: 9,431,236 →
Application: 14/595,046 →
Publication: US 2015/0126043
Method of Manufacturing Semiconductor Device, Including Film Having Uniform Thickness
Patent: 9,601,326 →
Application: 14/601,634 →
Publication: US 2015/0206736
Substrate Processing Apparatus, Method of Manufacturing Semiconductor Device, and Non-Transitory Computer-Readable Recording Medium
Patent: 9,587,313 →
Application: 14/605,157 →
Publication: US 2015/0132972
Substrate Processing Apparatus, Method for Manufacturing Semiconductor Device, and Recording Medium
Patent: 9,816,182 →
Application: 14/608,937 →
Publication: US 2015/0140835
Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus and Non-Transitory Computer-Readable Recording Medium
Patent: 9,899,211 →
Application: 14/613,926 →
Publication: US 2015/0214030
Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus, and Recording Medium
Patent: 9,536,734 →
Application: 14/619,318 →
Publication: US 2015/0228474
Cleaning Method, Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus, and Recording Medium
Patent: 9,587,308 →
Application: 14/622,115 →
Publication: US 2015/0232986
Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus, and Recording Medium
Patent: 9,890,458 →
Application: 14/628,963 →
Publication: US 2015/0243499
Semiconductor Device Having Electrode Made of High Work Function Material and Method of Manufacturing the Same
Patent: 9,472,637 →
Application: 14/629,338 →
Publication: US 2015/0171179
Semiconductor Device Having Electrode Made of High Work Function Material, Method and Apparatus for Manufacturing the Same
Patent: 9,437,704 →
Application: 14/629,345 →
Publication: US 2015/0171180
Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus, and Recording Medium
Patent: 9,613,798 →
Application: 14/634,280 →
Publication: US 2015/0255274
Method of Manufacturing Semiconductor Device, and Recording Medium
Patent: 9,607,827 →
Application: 14/638,396 →
Publication: US 2015/0179427
Substrate Processing Apparatus
Patent: 9,269,566 →
Application: 14/661,970 →
Publication: US 2015/0194302
Reaction Tube, Substrate Processing Apparatus, and Method of Manufacturing Semiconductor Device
Patent: 9,412,582 →
Application: 14/665,781 →
Publication: US 2015/0270125
Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus and Non-Transitory Computer-Readable Recording Medium
Patent: 9,425,039 →
Application: 14/666,969 →
Publication: US 2015/0279663
Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus, and Non-Transitory Computer-Readable Recording Medium
Patent: 9,418,855 →
Application: 14/667,063 →
Publication: US 2015/0279682
Substrate Processing Apparatus
Patent: 9,394,607 →
Application: 14/667,323 →
Publication: US 2015/0267296
Method of Manufacturing Semiconductor Device, Method of Processing Substrate, Substrate Processing Apparatus and Computer-Readable Recording Medium
Patent: 9,355,850 →
Application: 14/668,714 →
Publication: US 2015/0200102
Method of Manufacturing Semiconductor Device, Method of Processing Substrate, Substrate Processing Apparatus and Computer-Readable Recording Medium
Patent: 9,378,964 →
Application: 14/668,721 →
Publication: US 2015/0200103
Method of Manufacturing Semiconductor Device, Method of Processing Substrate, Substrate Processing Apparatus and Computer-Readable Recording Medium
Patent: 9,406,520 →
Application: 14/668,725 →
Publication: US 2015/0200104
Method for Manufacturing Semiconductor Device, Substrate Processing Apparatus and Non-Transitory Computer-Readable Recording Medium
Patent: 9,966,238 →
Application: 14/669,462 →
Publication: US 2015/0200081
Substrate Processing Apparatus
Patent: 9,732,421 →
Application: 14/671,211 →
Publication: US 2016/0060755
Method of Manufacturing Semiconductor Device, Using Hydrocarbon and Halogen-Based Precursors, Substrate Processing Apparatus for Processing Same, and Recording Medium Comprising Hydrocarbon and Halogen-Based Precursors
Patent: 9,922,821 →
Application: 14/671,504 →
Publication: US 2015/0303051
Substrate Processing Apparatus
Patent: 9,869,022 →
Application: 14/672,795 →
Publication: US 2016/0002787
Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus and Non-Transitory Computer-Readable Recording Medium
Patent: 9,330,903 →
Application: 14/677,199 →
Publication: US 2015/0287588
Method of Manufacturing Semiconductor Device, Semiconductor Device and Substrate Processing Apparatus
Patent: 9,263,251 →
Application: 14/681,055 →
Publication: US 2015/0214025
Method of Manufacturing Semiconductor Device and Substrate Processing Apparatus
Patent: 9,966,251 →
Application: 14/681,065 →
Publication: US 2015/0214042
Method of Manufacturing Semiconductor Device and Substrate Processing Apparatus
Patent: 9,966,252 →
Application: 14/681,067 →
Publication: US 2015/0214028
Method of Forming Metal-Containing Film
Patent: 9,650,715 →
Application: 14/697,274 →
Publication: US 2015/0225852
Method of Manufacturing Semiconductor Device
Patent: 9,190,281 →
Application: 14/708,004 →
Publication: US 2015/0243507
Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus, and Recording Medium
Patent: 9,520,282 →
Application: 14/719,097 →
Publication: US 2015/0255269
Method of Manufacturing a Siocn Film, Substrate Processing Apparatus, and Recording Medium
Patent: 9,412,585 →
Application: 14/725,865 →
Publication: US 2015/0262809
Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus, and Recording Medium
Patent: 9,741,556 →
Application: 14/728,728 →
Publication: US 2015/0357181
Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus, and Non-Transitory Computer-Readable Recording Medium
Patent: 9,390,916 →
Application: 14/747,674 →
Publication: US 2015/0287594
Cleaning Method, Manufacturing Method of Semiconductor Device, Substrate Processing Apparatus, and Recording Medium
Patent: 9,340,872 →
Application: 14/752,131 →
Publication: US 2015/0376781
Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus, and Recording Medium
Patent: 9,786,493 →
Application: 14/778,170 →
Publication: US 2016/0284532
Substrate Processing Apparatus, Recording Medium and Method of Manufacturing Semiconductor Device
Patent: 9,595,460 →
Application: 14/781,074 →
Publication: US 2016/0307783
Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus, and Recording Medium
Patent: 9,735,006 →
Application: 14/791,990 →
Publication: US 2015/0311060
Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus, and Recording Medium
Patent: 9,691,606 →
Application: 14/794,519 →
Publication: US 2016/0013042
Method of Manufacturing Semiconductor Device Including Forming a Film Containing a First Element, a Second Element and Carbon, Substrate Processing Apparatus, and Recording Medium
Patent: 9,978,587 →
Application: 14/804,604 →
Publication: US 2016/0024659
Substrate Processing Apparatus, Method of Manufacturing Semiconductor Device, and Non-Transitory Computer-Readable Recording Medium
Patent: 9,824,883 →
Application: 14/805,104 →
Publication: US 2015/0340226
Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus and Recording Medium
Patent: 9,974,191 →
Application: 14/805,506 →
Publication: US 2015/0334849
Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus, and Recording Medium
Patent: 9,698,007 →
Application: 14/807,670 →
Publication: US 2015/0332916
Substrate Processing Apparatus
Patent: 9,487,863 →
Application: 14/810,996 →
Publication: US 2016/0230280
Method of Manufacturing a Semiconductor Device
Patent: 9,368,358 →
Application: 14/832,496 →
Publication: US 2016/0056044
Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus, and Recording Medium
Patent: 9,640,387 →
Application: 14/838,793 →
Publication: US 2016/0064219
Substrate Processing Apparatus, Method of Manufacturing Semiconductor Device and Non-Transitory Computer-Readable Recording Medium
Patent: 9,842,754 →
Application: 14/839,179 →
Publication: US 2015/0371883
Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus, and Non-Transitory Computer-Readable Recording Medium
Patent: 9,460,914 →
Application: 14/856,244 →
Publication: US 2016/0079056
Method of Processing Substrate, Substrate Processing Apparatus, and Recording Medium
Patent: 9,735,007 →
Application: 14/856,881 →
Publication: US 2016/0086801
Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus, and Recording Medium
Application: 14/859,855 →
Publication: US 2016/0097126
Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus and Non-Transitory Computer-Readable Recording Medium
Patent: 9,711,348 →
Application: 14/859,924 →
Publication: US 2016/0086791
Substrate Processing Apparatus and Substrate Processing System
Patent: 9,431,220 →
Application: 14/861,051 →
Method of Manufacturing Semiconductor Device
Patent: 9,455,137 →
Application: 14/864,167 →
Publication: US 2016/0013044
Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus, and Non-Transitory Computer-Readable Recording Medium
Patent: 9,558,937 →
Application: 14/886,768 →
Publication: US 2016/0042940
Maintenance Method of Substrate Processing Apparatus, Method for Manufacturing Semiconductor Device, Substrate Processing Apparatus, and Storage Medium Capable of Reading Maintenance Program of Substrate Processing Apparatus
Application: 14/914,142 →
Publication: US 2016/0211157
Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus, Gas Supply System, and Recording Medium
Patent: 9,412,587 →
Application: 14/929,973 →
Publication: US 2016/0141173
Method of Manufacturing Semiconductor Device and Substrate Processing Apparatus
Patent: 9,460,916 →
Application: 14/939,901 →
Publication: US 2016/0071721
Substrate Processing Apparatus and a Method of Manufacturing a Semiconductor Device
Patent: 9,472,424 →
Application: 14/958,517 →
Publication: US 2016/0086818
Method of Manufacturing Semiconductor Device
Patent: 9,666,494 →
Application: 14/975,987 →
Publication: US 2016/0293498
Method of Manufacturing Semiconductor Device
Patent: 9,728,431 →
Application: 14/979,898 →
Publication: US 2017/0092517
Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus, and Recording Medium
Patent: 9,741,555 →
Application: 14/994,334 →
Publication: US 2016/0203978
Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus and Recording Medium
Application: 15/010,333 →
Publication: US 2016/0225617
Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus, and Recording Medium
Patent: 9,524,867 →
Application: 15/010,682 →
Publication: US 2016/0225607
Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus, and Recording Medium
Application: 15/011,033 →
Publication: US 2016/0153090
Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus, and Recording Medium
Patent: 9,728,400 →
Application: 15/011,117 →
Publication: US 2016/0155627
Method of Manufacturing Semiconductor Device
Patent: 9,735,068 →
Application: 15/015,461 →
Publication: US 2016/0293500
Substrate Processing Apparatus, Method for Manufacturing Semiconductor Device, and Non-Transitory Computer-Readable Recording Medium
Patent: 9,966,289 →
Application: 15/024,539 →
Publication: US 2016/0247699
Substrate Processing Apparatus and Heating Unit
Patent: 9,957,616 →
Application: 15/051,740 →
Publication: US 2016/0244878
Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus, and Recording Medium
Application: 15/053,489 →
Publication: US 2016/0244875
Substrate Processing Apparatus
Patent: 9,589,819 →
Application: 15/066,081 →
Publication: US 2017/0092518
Method of Manufacturing Semiconductor Device
Patent: 9,666,477 →
Application: 15/067,790 →
Publication: US 2016/0293480
Method of Manufacturing a Semiconductor Device and Recording Medium
Patent: 9,666,439 →
Application: 15/070,387 →
Publication: US 2016/0284552
Substrate Processing Apparatus
Patent: 9,818,630 →
Application: 15/070,640 →
Publication: US 2017/0221738
Method of Manufacturing Semiconductor Device and Non-Transitory Computer-Readable Recording Medium
Patent: 9,793,112 →
Application: 15/078,253 →
Publication: US 2016/0203976
Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus, Substrate Processing System and Recording Medium
Patent: 9,673,043 →
Application: 15/084,847 →
Publication: US 2016/0211135
Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus and Recording Medium
Patent: 9,953,830 →
Application: 15/124,915 →
Publication: US 2017/0018419
Substrate Processing Apparatus, Non-Transitory Computer-Readable Recording Medium Thereof and Semiconductor Manufacturing Method by Employing Thereof
Application: 15/141,580 →
Publication: US 2016/0237560
Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus, and Recording Medium
Patent: 9,773,661 →
Application: 15/170,352 →
Publication: US 2016/0358767
Substrate Processing Apparatus, Apparatus for Manufacturing Semiconductor Device, and Gas Supply System
Patent: 9,540,728 →
Application: 15/190,578 →
Publication: US 2016/0305023
Method of Manufacturing Semiconductor Device, Method of Processing Substrate, Substrate Processing Apparatus and Computer-Readable Recording Medium
Patent: 9,745,656 →
Application: 15/191,055 →
Publication: US 2016/0305017
Method of Manufacturing Semiconductor Device
Patent: 9,559,022 →
Application: 15/195,086 →
Method of Manufacturing a Siocn Film, Substrate Processing Apparatus and Recording Medium
Patent: 9,837,262 →
Application: 15/202,168 →
Publication: US 2016/0314959
Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus, and Recording Medium
Application: 15/204,781 →
Publication: US 2017/0011908
Gas Supply Nozzle, Substrate Processing Apparatus, and Non-Transitory Computer-Readable Recording Medium
Application: 15/211,583 →
Publication: US 2017/0051408
Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus, and Recording Medium
Patent: 9,620,357 →
Application: 15/216,956 →
Publication: US 2017/0025271
Method of Manufacturing Semiconductor Device
Patent: 9,698,050 →
Application: 15/223,020 →
Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus, and Recording Medium
Patent: 9,934,962 →
Application: 15/223,288 →
Publication: US 2017/0040157
Semiconductor Device Having Electrode Made of High Work Function Material, Method and Apparatus for Manufacturing the Same
Patent: 9,653,301 →
Application: 15/228,840 →
Publication: US 2016/0343573
Substrate Processing Apparatus
Patent: 9,816,183 →
Application: 15/259,944 →
Publication: US 2017/0067157
Substrate Processing Apparatus
Patent: 9,966,286 →
Application: 15/263,478 →
Publication: US 2016/0379858
Method of Manufacturing Semiconductor Device
Patent: 9,991,179 →
Application: 15/265,371 →
Publication: US 2017/0358506
Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus, and Recording Medium
Patent: 9,916,976 →
Application: 15/267,390 →
Publication: US 2017/0004961
Substrate Processing Apparatus
Patent: 9,875,920 →
Application: 15/270,419 →
Publication: US 2018/0025920
Method of Manufacturing Semiconductor Device and Non-Transitory Computer-Readable Recording Medium
Patent: 9,831,249 →
Application: 15/271,962 →
Publication: US 2017/0092647
Method of Manufacturing Semiconductor Device, Method of Cleaning Interior of Process Chamber, Substrate Processing Apparatus, and Recording Medium
Patent: 9,895,727 →
Application: 15/272,844 →
Publication: US 2017/0087606
Method of Manufacturing Semiconductor Device
Patent: 9,653,351 →
Application: 15/273,067 →
Publication: US 2017/0011958
Method of Manufacturing a Semiconductor Device
Patent: 9,984,887 →
Application: 15/273,780 →
Publication: US 2017/0092503
Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus, and Recording Medium
Application: 15/274,140 →
Publication: US 2017/0092486
Method of Manufacturing Semiconductor Device
Patent: 9,728,409 →
Application: 15/275,576 →
Publication: US 2017/0011926
Method of Manufacturing Semiconductor Device
Patent: 9,812,355 →
Application: 15/280,239 →
Publication: US 2017/0092535
Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus, and Recording Medium
Patent: 9,865,458 →
Application: 15/347,347 →
Publication: US 2017/0117133
Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus, and Recording Medium
Patent: 9,691,609 →
Application: 15/368,337 →
Publication: US 2017/0084455
Method of Manufacturing Semiconductor Device
Patent: 9,978,653 →
Application: 15/389,766 →
Publication: US 2018/0090397
Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus, and Recording Medium
Application: 15/415,032 →
Publication: US 2017/0221699
Substrate Processing Apparatus
Application: 15/418,796 →
Publication: US 2017/0140963
Cleaning Method and Method of Manufacturing Semiconductor Device
Patent: 9,976,214 →
Application: 15/434,796 →
Publication: US 2017/0260626
Method of Manufacturing Semiconductor Device by Forming and Modifying Film on Substrate
Application: 15/436,192 →
Publication: US 2017/0162386
Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus, and Recording Medium
Patent: 9,997,354 →
Application: 15/448,519 →
Publication: US 2017/0263441
Method of Manufacturing Semiconductor Device
Patent: 9,905,413 →
Application: 15/453,163 →
Publication: US 2017/0178889
Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus, and Recording Medium
Patent: 9,881,789 →
Application: 15/453,731 →
Publication: US 2017/0178902
Method of Manufacturing Semiconductor Device Having Air Gap Between Wirings for Low Dielectric Constant
Application: 15/460,557 →
Publication: US 2017/0287731
Method of Manufacturing Semiconductor Device by Determining and Selecting Cooling Recipe Based on Temperature
Patent: 9,870,964 →
Application: 15/460,752 →
Method of Manufacturing Semiconductor Device
Application: 15/462,066 →
Publication: US 2018/0197877
Method of Manufacturing Semiconductor Device
Application: 15/465,891 →
Publication: US 2017/0287786
Method of Forming Silicon Layer in Manufacturing Semiconductor Device and Recording Medium
Patent: 9,941,119 →
Application: 15/468,966 →
Publication: US 2017/0213727
Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus, and Recording Medium
Application: 15/474,138 →
Publication: US 2017/0301539
Method of Manufacturing Semiconductor Device by Forming a Film on a Substrate, Substrate Processing Apparatus, and Recording Medium
Application: 15/511,831 →
Publication: US 2017/0287696
Method of Manufacturing Semiconductor Device
Patent: 9,966,261 →
Application: 15/632,806 →
Cleaning Method, Method of Manufacturing Semiconductor Device and Substrate Processing Apparatus
Patent: 9,982,347 →
Application: 15/672,901 →
Publication: US 2018/0044794
Method of Manufacturing Semiconductor Device
Application: 15/687,717 →
Publication: US 2018/0233348
Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus Comprising Exhaust Port and Multiple Nozzles, and Recording Medium
Application: 15/700,947 →
Publication: US 2018/0076017
Method of Manufacturing Semiconductor Device
Application: 15/703,631 →
Method of Manufacturing Semiconductor Device
Application: 15/704,603 →
Publication: US 2018/0182619
Method of Manufacturing Semiconductor Device
Application: 15/710,414 →
Method of Manufacturing Semiconductor Device
Application: 15/940,618 →
Boat of Wafer Processing Apparatus
Patent: 655,682 →
Application: 29/378,011 →
Boat of Wafer Processing Apparatus
Patent: 655,255 →
Application: 29/378,016 →
Related Assignments (19)
Other recorded transfers of the patents in this record — the chain of ownership.
Assignment of Assignor's Interest Jan 5, 2010
From: AKAE, NAONORI; HIROSE, YOSHIRO; TAKASAWA, YUSHIN; OTA, YOSUKE
To: HITACHI KOKUSAI ELECTRIC, INC.
Reel/Frame 023732/0773 →
Assignment of Assignor's Interest Feb 1, 2011
From: SASAJIMA, RYOTA; HIROSE, YOSHIRO; OTA, YOSUKE; AKAE, NAONORI
To: HITACHI KOKUSAI ELECTRIC INC.
Reel/Frame 025728/0146 →
Assignment of Assignor's Interest Feb 1, 2011
From: OTA, YOSUKE; AKAE, NAONORI; TAKASAWA, YUSHIN; HIROSE, YOSHIRO
To: HITACHI KOKUSAI ELECTRIC INC.
Reel/Frame 025768/0246 →
Assignment of Assignor's Interest Feb 8, 2011
From: HARADA, KAZUHIRO; ITATANI, HIDEHARU; HORII, SADAYOSHI
To: HITACHI KOKUSAI ELECTRIC INC.
Reel/Frame 025769/0376 →
Assignment of Assignor's Interest Feb 8, 2011
From: ABURATANI, YUKINORI; SHIMADA, MASAKAZU; MORITA, OSAMU
To: HITACHI KOKUSAI ELECTRIC INC.
Reel/Frame 025770/0296 →
Assignment of Assignor's Interest Feb 15, 2011
From: NABETA, KAZUYA; UKAE, NAOKI; TAKESHITA, MITSUNORI
To: HITACHI KOKUSAI ELECTRIC INC.
Reel/Frame 025810/0964 →
Assignment of Assignor's Interest Feb 24, 2011
From: YAMAZAKI, KEISHIN; HAYASHIDA, AKIRA; UENO, MASAAKI; IZUMI, MANABU
To: HITACHI KOKUSAI ELECTRIC INC.
Reel/Frame 025858/0876 →
Assignment of Assignor's Interest Mar 4, 2011
From: MORITA, OSAMU
To: HITACHI KOKUSAI ELECTRIC INC.
Reel/Frame 025904/0397 →
Assignment of Assignor's Interest Mar 16, 2011
From: NOMURA, MAKOTO
To: HITACHI KOKUSAI ELECTRIC INC.
Reel/Frame 025967/0472 →
Assignment of Assignor's Interest Mar 21, 2011
From: KAGA, YUKINAO; SAITO, TATSUYUKI; SAKAI, MASANORI; YOKOGAWA, TAKASHI
To: HITACHI KOKUSAI ELECTRIC INC.
Reel/Frame 025991/0570 →
Assignment of Assignor's Interest Apr 4, 2011
From: SAITO, TATSUYUKI; SAKAI, MASANORI; KAGA, YUKINAO; YOKOGAWA, TAKASHI
To: HITACHI KOKUSAI ELECTRIC INC.
Reel/Frame 026068/0554 →
Assignment of Assignor's Interest May 23, 2011
From: TAKASAWA, YUSHIN; HIROSE, YOSHIRO; KAMAKURA, TSUKASA; KAGA, YUKINAO
To: HITACHI KOKUSAI ELECTRIC INC.
Reel/Frame 026324/0332 →
Assignment of Assignor's Interest Jun 29, 2011
From: SONOBE, JUN; TADAKI, YUDAI
To: HITACHI KOKUSAI ELECTRIC INC.; L'AIR LIQUIDE SOCIETE ANONYME POUR L'ETUDE ET L'EXPLOITATION DES PROCEDES GEORGES CLAUDE
Reel/Frame 026523/0546 →
Assignment of Assignor's Interest Jun 29, 2011
From: HIROSE, YOSHIRO; TAKASAWA, YUSHIN; KAMAKURA, TSUKASA; NAKAMURA, YOSHINOBU
To: HITACHI KOKUSAI ELECTRIC INC.
Reel/Frame 026522/0957 →
Assignment of Assignor's Interest Jun 29, 2011
From: KAMEDA, KENJI
To: HITACHI KOKUSAI ELECTRIC INC.; L'AIR LIQUIDE SOCIETE ANONYME POUR L'ETUDE ET L'EXPLOITATION DES PROCEDES GEORGES CLAUDE
Reel/Frame 026523/0375 →
Assignment of Assignor's Interest Jul 15, 2011
From: KOSUGI, TETSUYA; MURATA, HITOSHI; SUGIURA, SHINOBU; UENO, MASAAKI
To: HITACHI KOKUSAI ELECTRIC INC.
Reel/Frame 026599/0280 →
Assignment of Assignor's Interest Sep 12, 2011
From: AKAE, NAONORI; HIROSE, YOSHIRO; MURAKAMI, KOTARO
To: HITACHI KOKUSAI ELECTRIC INC.
Reel/Frame 026887/0229 →
Assignment of Assignor's Interest Mar 10, 2016
From: TAKANO, SATOSHI
To: HITACHI KOKUSAI ELECTRIC INC.
Reel/Frame 037945/0923 →
Assignment of Assignor's Interest Aug 10, 2016
From: L'AIR LIQUIDE SOCIETE ANONYME POUR L'ETUDE ET L'EXPLOITATION DES PROCEDES GEORGES CLAUDE
To: HITACHI KOKUSAI ELECTRIC INC.
Reel/Frame 039397/0578 →