Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium
The present disclosure suppresses oxidation of a base film on a substrate surface during the formation of an oxide film. A method of manufacturing a semiconductor device according to the present disclosure includes forming an initial layer including a predetermined element and having a thickness of several atomic layers on a substrate in a process chamber by supplying a predetermined-element-containing gas to the substrate, and forming an oxide film including the predetermined element on the initial layer by performing a cycle a predetermined number of times, the cycle including supplying a precursor gas including the predetermined element to the substrate in the process chamber and supplying an oxygen-containing gas and a hydrogen-containing gas to the substrate heated in the process chamber under a pressure lower than an atmospheric pressure.
1. A method of manufacturing a semiconductor device, comprising:
forming an initial layer including a predetermined element and having a thickness greater than or equal to two atomic layers and less than or equal to six atomic layers on a substrate in a process chamber by supplying a predetermined-element-containing gas to the substrate; and
forming an oxide film including the predetermined element on the initial layer by performing a cycle a predetermined number of times, the cycle comprising supplying a precursor gas including the predetermined element to the substrate in the process chamber and supplying an oxygen-containing gas and a hydrogen-containing gas to the substrate heated in the process chamber under a pressure lower than an atmospheric pressure,
wherein the initial layer serves as a layer for preventing oxidation of a surface of the substrate during the forming of the oxide film.
2. The method of claim 1 , wherein the initial layer includes a nitride layer in which a ratio of the predetermined element is greater than a ratio of the predetermined element in a nitride layer having a stoichiometric composition.
3. The method of claim 1 , wherein the act of forming the initial layer includes forming a nitride layer as the initial layer by performing a cycle a predetermined number of times, the cycle comprising supplying the predetermined-element-containing gas to the substrate in the process chamber and supplying a nitriding gas to the substrate in the process chamber.
4. The method of claim 3 , wherein the nitride layer is formed to have a ratio of the predetermined element greater than a ratio of the predetermined element in a nitride layer having a stoichiometric composition by making an unsaturated nitriding reaction which occurs in the act of supplying the nitriding gas.
5. The method of claim 3 , wherein the act of forming the initial layer includes repeating a cycle a predetermined number of times, the cycle alternately performing the act of supplying the predetermined-element-containing gas and the act of supplying the nitriding gas.
6. The method of claim 1 , wherein the act of forming the initial layer includes forming a nitride layer as the initial layer by performing a cycle a predetermined number of times, the cycle comprising supplying the predetermined-element-containing gas including a halogen group to the substrate in the process chamber, supplying the predetermined-element-containing gas including an amino group to the substrate in the process chamber, and supplying a nitriding gas to the substrate in the process chamber.
7. The method of claim 6 , wherein the nitride layer is formed to have a ratio of the predetermined element greater than a ratio of the predetermined element in a nitride layer having a stoichiometric composition by making an unsaturated nitriding reaction which occurs in the act of supplying the nitriding gas.
8. The method of claim 6 , wherein the predetermined-element-containing gas including the halogen group and the precursor gas including the predetermined element are constituted by an identical material.
9. The method of claim 1 , wherein the act of forming the initial layer includes forming a layer composed of the predetermined element as the initial layer by performing a cycle a predetermined number of times, the cycle comprising supplying the predetermined-element-containing gas including a halogen group to the substrate in the process chamber and supplying the predetermined-element-containing gas including an amino group to the substrate in the process chamber.
10. The method of claim 1 , wherein the act of forming the initial layer includes forming an oxynitride layer as the initial layer by performing a cycle a predetermined number of times, the cycle comprising supplying the predetermined-element-containing gas to the substrate in the process chamber, supplying a nitriding gas to the substrate in the process chamber, and supplying an oxidizing gas to the substrate in the process chamber.
11. The method of claim 1 , wherein the predetermined-element-containing gas and the precursor gas including the predetermined element are constituted by an identical material.
12. The method of claim 1 , wherein the act of forming the oxide film includes repeating a cycle a predetermined number of times, the cycle alternately performing the act of supplying the precursor gas and the act of supplying the oxygen-containing gas and the hydrogen-containing gas.
13. The method of claim 1 , wherein the act of forming the oxide film includes changing at least a portion of the initial layer into the oxide film or an oxynitride film.
14. The method of claim 1 , wherein the act of forming the oxide film includes changing an entire portion of the initial layer into the oxide film or an oxynitride film.
15. A method of manufacturing a semiconductor device, comprising:
forming an initial layer including a layer composed of a predetermined element and at least one of a nitride layer and an oxynitride layer, the initial layer having a thickness greater than or equal to two atomic layers and less than or equal to six atomic layers on a substrate in a process chamber by supplying a predetermined-element-containing gas to the substrate; and
forming an oxide film including the predetermined element on the initial layer by performing a cycle a predetermined number of times, the cycle comprising supplying a precursor gas including the predetermined element to the substrate in the process chamber and supplying an oxygen-containing gas and a hydrogen-containing gas to the substrate heated in the process chamber under a pressure lower than an atmospheric pressure,
wherein the initial layer serves as a layer for preventing oxidation of a surface of the substrate during the forming of the oxide film.