Patent Assignment
Reel/Frame 032102/0272
Assignment of Assignor's Interest
Recorded: 2014-01-31
Pages: 7
Assignors
SANO, ATSUSHI
Executed: 2014-01-16
HIROSE, YOSHIRO
Executed: 2014-01-16
AKAE, NAONORI
Executed: 2014-01-16
Assignee
HITACHI KOKUSAI ELECTRIC INC.
14-1, SOTOKANDA 4-CHOME, CHIYODA-KU, TOKYO, 1018980, JAPAN
Covered Property
(1)
Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus, and Recording Medium
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.