Method of manufacturing semiconductor device
A method of manufacturing a semiconductor device includes providing a substrate having an insulating film and a plurality of conductive films on a surface; reducing the substrate by supplying a first reducing gas to the substrate so that at least one of a plurality of process conditions of the first reducing gas is controlled so that a product of a plurality of process conditions becomes a predetermined value, wherein the process conditions of the first reducing gas include a partial pressure of the first reducing gas in a region where the substrate exists and a time taken to supply the first reducing gas to the substrate corresponding to a temperature of the first reducing gas; and selectively forming a metal film on the plurality of the reduced conductive films by supplying a second reducing gas and a metal-containing gas to the substrate.
1. A method of manufacturing a semiconductor device, comprising:
providing a substrate having an insulating film and a plurality of conductive films on a surface thereof, wherein each of the plurality of conductive films has a different incubation time;
reducing the plurality of the conductive films by supplying a first reducing gas to the substrate, wherein process conditions of the first reducing gas are controlled so that a difference in incubation time among the plurality of conductive films is 0.01% or more and 50% or less; and
selectively forming a metal film on the plurality of the reduced conductive films by supplying a second reducing gas and a metal-containing gas to the substrate.
2. The method of manufacturing a semiconductor device according to claim 1 , wherein the process conditions of the first reducing gas include a partial pressure of the first reducing gas in a region where the substrate exists and a time taken to supply the first reducing gas to the substrate corresponding to a predetermined temperature of the first reducing gas, and by adjusting at least one of the process conditions of the first reducing gas so that a product of the process conditions becomes a predetermined value, the plurality of the conductive films are reduced in a state that the insulating film is not substantially reduced.
3. The method of manufacturing a semiconductor device according to claim 2 , wherein the predetermined value is determined so that an average number of atoms per unit area included in the first reducing gas adsorbed on the insulating film becomes a value of 0.0001 or more and 0.01 or less.
4. The method of manufacturing a semiconductor device according to claim 3 , wherein the temperature of the first reducing gas is set to be a value in a range of 200 to 300° C., the partial pressure of the first reducing gas in the region where the substrate exists is set to be a value in a range of 0.1 to 10 Pa, and the time taken to supply the first reducing gas to the substrate is set to be a value in a range of 0.01 to 10 minutes.
5. The method of manufacturing a semiconductor device according to claim 1 , wherein, in the reducing of the plurality of the conductive films, the first reducing gas is supplied to the substrate in a pulse manner.
6. The method of manufacturing a semiconductor device according to claim 5 , wherein, in the reducing of the plurality of the conductive films, an inert gas is supplied at all times to the region where the substrate exists.
7. The method of manufacturing a semiconductor device according to claim 6 , wherein, in the reducing of the plurality of the conductive films, a total pressure of the region where the substrate exists is set to be a constant value.
8. The method of manufacturing a semiconductor device according to claim 1 , wherein the plurality of the conductive films are metal interconnection and barrier metal films.
9. The method of manufacturing a semiconductor device according to claim 8 , wherein the barrier metal films are a tantalum film and a tantalum nitride film, the first reducing gas is a boron-containing gas, the second reducing gas is a hydrogen-containing gas different from the first reducing gas, the metal-containing gas is a tungsten-containing gas, and the metal film is a tungsten film.
10. The method of manufacturing a semiconductor device according to claim 1 , wherein the metal film is formed by using a gas-phase reaction of the second reducing gas and the metal-containing gas.
11. The method of manufacturing a semiconductor device according to claim 1 , further comprising supplying an etching gas to the substrate where the metal film is formed.
12. The method of manufacturing a semiconductor device according to claim 1 , further comprising, before the reducing of the plurality of the conductive films, supplying the second reducing gas to the substrate.
13. A method of manufacturing a semiconductor device, comprising:
providing a substrate having an insulating film and a plurality of conductive films on a surface thereof; reducing the substrate by supplying a first reducing gas to the substrate so that at least one of a plurality of process conditions of the first reducing gas is controlled so that a product of a plurality of process conditions becomes a predetermined value, wherein the process conditions of the first reducing gas include a partial pressure of the first reducing gas in a region where the substrate exists and a time taken to supply the first reducing gas to the substrate corresponding to a temperature of the first reducing gas; and
selectively forming a metal film on the plurality of the reduced conductive films by supplying a second reducing gas and a metal-containing gas in a gas-phase reacted state to the substrate.