Patent Assignment
Reel/Frame 025769/0376
Assignment of Assignor's Interest
Recorded: 2011-02-08
Pages: 4
Assignors
HARADA, KAZUHIRO
Executed: 2011-01-12
ITATANI, HIDEHARU
Executed: 2011-01-12
HORII, SADAYOSHI
Executed: 2011-01-12
Assignee
HITACHI KOKUSAI ELECTRIC INC.
14-1, SOTOKANDA 4-CHOME, CHIYODA-KU, TOKYO, 1018980, JAPAN
Covered Property
(1)
Method of Manufacturing Semiconductor Device, Method of Processing Substrate and Substrate Processing Apparatus
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.