Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium
A method of manufacturing a semiconductor device is disclosed. The method includes forming a thin film containing a predetermined element, boron, carbon, and nitrogen on a substrate by performing a cycle a predetermined number of times. The cycle includes forming a first layer containing boron and a halogen group by supplying a first precursor gas containing boron and the halogen group to the substrate; and forming a second layer containing the predetermined element, boron, carbon, and nitrogen by supplying a second precursor gas containing the predetermined element and an amino group to the substrate and modifying the first layer.
1. A method of manufacturing a semiconductor device, comprising forming a thin film containing a predetermined element, boron, carbon, and nitrogen on a substrate by performing a cycle a first predetermined number of times, the cycle comprising:
forming a first layer containing boron and a halogen group by supplying a first precursor gas containing boron and the halogen group to the substrate; and
forming a second layer containing the predetermined element, boron, carbon, and nitrogen by supplying a second precursor gas containing the predetermined element and an amino group to the substrate and modifying the first layer,
wherein in the act of forming the thin film by performing the cycle the first predetermined number of times, the first layer is first formed on the substrate.
2. The method of claim 1 , wherein in the act of forming the thin film by performing the cycle the first predetermined number of times, the first layer is first formed on the substrate and then the second layer is formed.
3. The method of claim 1 , wherein in the act of forming the thin film by performing the cycle the first predetermined number of times, the first layer is first formed on the substrate and then the second layer is formed on the first layer.
4. The method of claim 1 , wherein in the act of forming the second layer, the first layer reacts with the second precursor gas to extract, from the first layer, at least a portion of atoms constituting the halogen group in the first layer and separate, from the second precursor gas, at least a portion of ligands including the amino group in the second precursor gas.
5. The method of claim 1 , wherein in the act of forming the second layer, the first layer reacts with the second precursor gas to extract, from the first layer, at least a portion of atoms constituting the halogen group in the first layer, separate, from the second precursor gas, at least a portion of ligands including the amino group in the second precursor gas, and bond the boron in the first layer and the predetermined element in the second precursor gas from which at least the portion of ligands are separated.
6. The method of claim 1 , the cycle further comprising supplying a reaction gas to the substrate, the reaction gas being different from the first precursor gas and the second precursor gas.
7. The method of claim 1 , the cycle further comprising modifying the second layer by supplying a reaction gas to the substrate, the reaction gas being different from the first precursor gas and the second precursor gas.
8. The method of claim 1 , the cycle further comprising forming a third layer having a carbon concentration lower than a carbon concentration of the second layer by supplying a reaction gas to the substrate and modifying the second layer, the reaction gas being different from the first precursor gas and the second precursor gas.
9. The method of claim 4 , wherein the reaction gas includes a nitriding gas.
10. The method of claim 4 , wherein the reaction gas includes a nitriding gas activated by heat.
11. The method of claim 4 , wherein the reaction gas includes a nitriding gas activated by plasma.
12. The method of claim 4 , wherein the reaction gas includes a gas containing nitrogen and carbon.
13. The method of claim 6 , wherein in the act of forming the thin film by performing the cycle the first predetermined number of times, the cycle performs in the following order:
alternately performing the act of forming the first layer and the act of forming the second layer a second predetermined number of times; and
the act of forming the third layer.
14. The method of claim 1 , wherein in the act of forming the first layer, a carbon-containing gas is supplied to the substrate together with the first precursor gas.
15. The method of claim 1 , wherein in the act of forming the second layer, a carbon-containing gas is supplied to the substrate together with the second precursor gas.
16. The method of claim 6 , wherein in the act of supplying a reaction gas, a carbon-containing gas is supplied to the substrate together with the reaction gas.
17. A non-transitory computer-readable recording medium storing a program that causes a computer to perform a process of forming a thin film containing a predetermined element, boron, carbon, and nitrogen on a substrate in a process chamber by performing a cycle a predetermined number of times, the cycle comprising:
forming a first layer containing boron and a halogen group by supplying a first precursor gas containing boron and the halogen group to the substrate; and
forming a second layer containing the predetermined element, boron, carbon, and nitrogen by supplying a second precursor gas containing the predetermined element and an amino group to the substrate and modifying the first layer,
wherein in the act of forming the thin film by performing the cycle the predetermined number of times, the first layer is first formed on the substrate.