Method of manufacturing semiconductor device
A method of manufacturing a semiconductor device may include: (a) loading a substrate into a process chamber, the substrate having: a process surface provided with a first metal film containing at least a first metal element; (b) forming a second metal film on the substrate loaded in the process chamber by alternately supplying a metal compound and a first reactive gas reactive with the metal compound to the substrate a plurality of times; (c) alternately performing steps (c-1) and (c-2) a plurality of times wherein the step (c-1) includes: forming an amorphous third metal film on the second metal film, and the step (c-2) includes: forming a fourth metal film on the third metal film; and (d) forming an amorphous fifth metal film on the fourth metal film by supplying the metal compound mixed with the second reactive gas to the substrate.
1. A method of manufacturing a semiconductor device, comprising:
(a) loading a substrate into a process chamber, the substrate having: a process surface provided with a first metal film containing at least a first metal element; and surfaces without the first metal film;
(b) forming a second metal film on the substrate loaded in the process chamber by alternately supplying a metal compound and a first reactive gas reactive with the metal compound to the substrate a plurality of times, wherein the metal compound contains at least a second metal element different from the first metal element;
(c) alternately performing steps (c-1) and (c-2) a plurality of times wherein the step (c-1) comprises: forming an amorphous third metal film on the second metal film by supplying the metal compound mixed with a second reactive gas reactive with the metal compound to the substrate, and the step (c-2) comprises: forming a fourth metal film on the third metal film by alternately supplying the metal compound and the first reactive gas to the substrate at least once; and
(d) forming an amorphous fifth metal film on the fourth metal film by supplying the metal compound mixed with the second reactive gas to the substrate.
2. The method of claim 1 , wherein the first reactive gas is different from the second reactive gas, and each of the first reactive gas and the second reactive gas comprises at least a reducing gas.
3. The method of claim 1 , wherein the metal compound comprises at least fluorine, and each of the first reactive gas and the second reactive gas comprises at least a reducing gas capable of reducing fluorine.
4. The method of claim 1 , further comprising: (e) heating the substrate after performing the step (d).
5. The method of claim 1 , wherein the fourth metal film formed in the step (c-2) is thinner than the third metal film.
6. The method of claim 1 , wherein the first metal element comprises titanium, and the second metal element comprises tungsten.