Method of manufacturing a SiOCN film, substrate processing apparatus, and recording medium
A method of manufacturing a semiconductor device includes forming a thin film containing a predetermined element, oxygen, carbon, and nitrogen on a substrate by performing a cycle a predetermined number of times after supplying a nitriding gas to the substrate. The cycle includes performing the following steps in the following order: supplying a carbon-containing gas to the substrate; supplying a predetermined element-containing gas to the substrate; supplying the carbon-containing gas to the substrate; supplying an oxidizing gas to the substrate; and supplying the nitriding gas to the substrate.
1. A method of manufacturing a semiconductor device, comprising forming a thin film containing a predetermined element, oxygen, carbon, and nitrogen on a substrate by performing a cycle a predetermined number of times, the cycle comprising performing the following under a non-plasma atmosphere in the following order:
(a) supplying a carbon-containing gas to the substrate;
(b) supplying a predetermined element-containing gas to the substrate;
(c) supplying a carbon-containing gas to the substrate;
(d) supplying an oxidizing gas to the substrate; and
(e) supplying a nitriding gas to the substrate,
wherein in the (a), a first carbon-containing layer is formed directly on a portion of an uppermost surface of the substrate,
wherein in the (b), a predetermined element-containing layer is formed directly on the uppermost surface of the substrate, which has the first carbon-containing layer formed on the portion thereof,
wherein in the (c), a second carbon-containing layer is formed directly on a portion of a surface of the predetermined element-containing layer.
2. The method of claim 1 ,
wherein in the (d), a layer containing the predetermined element, oxygen, and carbon is formed by oxidizing a layer comprising the first carbon-containing layer, the predetermined element-containing layer, and the second carbon-containing layer, and
wherein in the (e), a layer containing the predetermined element, oxygen, carbon, and nitrogen is formed by nitriding the layer containing the predetermined element, oxygen, and carbon.
3. The method of claim 2 , wherein in the (e), the layer containing the predetermined element, oxygen, carbon, and nitrogen is formed, and an uppermost surface of the layer containing the predetermined element, oxygen, carbon, and nitrogen is modified.
4. The method of claim 2 , wherein the first carbon-containing layer and the second carbon-containing layer are discontinuous layers.
5. The method of claim 2 , wherein the first carbon-containing layer is formed by adsorbing the carbon-containing gas on the portion of the uppermost surface of the substrate.
6. The method of claim 5 , wherein the adsorption of the carbon-containing gas on the portion of the uppermost surface of the substrate is unsaturated.
7. The method of claim 5 , wherein the first carbon-containing layer is a discontinuous adsorption layer of the carbon-containing gas.
8. The method of claim 2 , wherein the second carbon-containing layer is formed by adsorbing the carbon-containing gas on the portion of the surface of the predetermined element-containing layer.
9. The method of claim 8 , wherein the adsorption of the carbon-containing gas on the portion of the surface of the predetermined element-containing layer is unsaturated.
10. The method of claim 8 , wherein the second carbon-containing layer is a discontinuous adsorption layer of the carbon-containing gas.
11. The method of claim 1 , wherein the act of forming the thin film further comprises, before performing the cycle the predetermined number of times, supplying the nitriding gas to the substrate in the non-plasma atmosphere.
12. The method of claim 1 , wherein the act of forming the thin film further comprises, before performing the cycle the predetermined number of times, modifying an uppermost surface of the substrate by supplying the nitriding gas to the substrate in the non-plasma atmosphere.
13. The method of claim 1 , wherein the predetermined element comprises a semiconductor element or a metal element.
14. The method of claim 1 , wherein the predetermined element comprises silicon.
15. A non-transitory computer-readable recording medium storing a program that causes a computer to perform a process of forming a thin film containing a predetermined element, oxygen, carbon, and nitrogen on a substrate by performing a cycle a predetermined number of times, the cycle comprising performing the following under a non-plasma atmosphere in the following order:
(a) supplying a carbon-containing gas to the substrate;
(b) supplying a predetermined element-containing gas to the substrate;
(c) supplying a carbon-containing gas to the substrate;
(d) supplying an oxidizing gas to the substrate; and
(e) supplying a nitriding gas to the substrate,
wherein in the (a), a first carbon-containing layer is formed directly on a portion of an uppermost surface of the substrate,
wherein in the (b), a predetermined element-containing layer is formed directly on the uppermost surface of the substrate, which has the first carbon-containing layer formed on the portion thereof,
wherein in the (c), a second carbon-containing layer is formed directly on a portion of a surface of the predetermined element-containing layer.