Method of manufacturing semiconductor device by forming and modifying film on substrate
A method of manufacturing a semiconductor device includes: forming a base film containing a first element and carbon on a substrate by supplying a film forming gas to the substrate; and oxidizing the base film by supplying an oxidizing gas to the substrate to modify the base film into a C-free oxide film containing the first element.
1. A method of manufacturing a semiconductor device, comprising:
forming a base film containing a first element, carbon, and oxygen on a substrate by performing a cycle a predetermined number of times, the cycle including performing:
forming a layer containing the first element, carbon and chlorine on the substrate by supplying a film forming gas containing chlorine to the substrate; and
oxidizing the layer containing the first element, carbon and chlorine by supplying a first oxidizing gas to the substrate; and
modifying the base film into a C-free oxide film containing the first element by supplying a second oxidizing gas to the substrate, which is heated, under an atmosphere of pressure lower than atmospheric pressure and oxidizing the base film,
wherein the second oxidizing gas, which is different from the first oxidizing gas, includes an oxygen-containing gas and a hydrogen-containing gas.
2. The method of claim 1 , wherein the base film further contains a second element different from the first element.
3. The method of claim 2 , wherein the first element includes at least one selected from a group consisting of a semiconductor element and a metal element, and the second element is nitrogen.
4. The method of claim 3 , wherein the oxide film does not contain nitrogen.
5. The method of claim 1 , wherein the base film includes at least one selected from a group consisting of a SiOCN film and a SiOC film, and the oxide film includes a SiO film.
6. The method of claim 1 , wherein the act of forming the base film and the act of oxidizing the base film are alternately repeated.
7. The method of claim 1 , wherein a cycle including the act of forming the layer containing the first element, carbon and chlorine and the act of oxidizing the layer containing the first element, carbon and chlorine is performed one time in the act of forming the base film.
8. The method of claim 1 , wherein a cycle including the act of forming the layer containing the first element, carbon and chlorine and the act of oxidizing the layer containing the first element, carbon and chlorine is performed for a plurality of times in the act of forming the base film.
9. The method of claim 1 , wherein the second oxidizing gas is supplied to the substrate under a non-plasma atmosphere in the act of oxidizing the base film.
10. The method of claim 1 , wherein carbon is extracted from the base film by causing the base film and the second oxidizing gas to react with each other in the act of oxidizing the base film.
11. The method of claim 1 , wherein carbon and nitrogen are extracted from the base film by causing the base film and the second oxidizing gas to react with each other in the act of oxidizing the base film.
12. The method of claim 1 , wherein a cycle including supplying a gas containing the first element and chlorine to the substrate and supplying a gas containing carbon to the substrate is performed a predetermined number of times in the act of forming the layer containing the first element, carbon and chlorine.
13. The method of claim 1 , wherein chlorine is at least partly extracted from the layer containing the first element, carbon and chlorine in the act of oxidizing the layer containing the first element, carbon and chlorine.