Substrate processing apparatus and method of manufacturing semiconductor device

1. A substrate processing apparatus comprising:

a process chamber configured to process a plurality of substrates vertically stacked at predetermined intervals;

a substrate retainer configured to hold the plurality of substrates in the process chamber; and

a first heat exchanger installed in the process chamber to support the substrate retainer from thereunder, and configured to perform a heat exchange with a gas flowing in a downward direction from a side of the substrate retainer in the process chamber,

wherein the first heat exchanger includes cylindrical members stacked in a vertical direction, each of the cylindrical members having a side wall and a hollow interior with a closed top end and an open bottom end, the cylindrical members being spatially connected to one another via through-holes disposed at the closed top end.

2. The substrate processing apparatus according to claim 1 , further comprising a second heat exchanger surrounding a portion of the first heat exchanger with a gap therebetween, wherein the second heat exchanger is configured to perform a heat exchange with the gas flowing through the gap in the downward direction.

3. The substrate processing apparatus according to claim 1 , wherein the through-holes are disposed at different two-dimensional positions.

4. The substrate processing apparatus according to claim 1 , wherein a height of a cylindrical member at an upper portion of the stacked structure is less than that of a cylindrical member at a lower portion of the stacked structure.

5. The substrate processing apparatus according to claim 1 , further comprising a lower insulating part installed under the first heat exchanger and made of a material having a thermal conductivity lower than that of the first heat exchanger.

6. The substrate processing apparatus according to claim 5 , wherein the lower insulating plate includes a plurality of plate members stacked in the vertical direction and a column member configured to support the plurality of plate members.

7. The substrate processing apparatus according to claim 5 , further comprising an insulating ring installed to surround the lower insulating part and made of a material having the thermal conductivity lower than that of the first heat exchanger.

8. The substrate processing apparatus according to claim 1 , further comprising a slit disposed in a sidewall of a lower portion of the first heat exchanger.

9. The substrate processing apparatus according to claim 1 , further comprising an induction heating part installed outside the process chamber and disposed to correspond to at least a periphery of a region where the plurality of substrates are stacked,

wherein at least a portion of the first heat exchanger is disposed to overlap with a lower end of the induction heating part.

10. The substrate processing apparatus according to claim 1 , wherein the first heat exchanger further comprises an insulating plate disposed at an open bottom end of a lowermost cylindrical member of the stacked structure.

11. The substrate processing apparatus according to claim 1 , wherein a closed top end of an uppermost cylindrical member of the stacked structure is without a through-hole.

12. A substrate processing apparatus comprising:

a process chamber configured to process a plurality of substrates vertically stacked at predetermined intervals;

a substrate retainer configured to hold the plurality of substrates in the process chamber;

a first heat exchanger installed in the process chamber to support the substrate retainer from a lower portion of the substrate retainer, and configured to perform a heat exchange with a gas flowing in a downward direction from a side of the substrate retainer in the process chamber; and

a lower insulating part installed under the first heat exchanger and made of a material having a thermal conductivity lower than that of the first heat exchanger,

wherein the first heat exchanger includes a hollow cylindrical insulating tube vertically extending in the downward direction and an insulating plate installed in the insulating tube, and

regions in the insulating tube over and under the insulating plate are spatially connected to each other.

13. The substrate processing apparatus according to claim 12 , wherein the lower insulating part includes a plurality of plate members stacked vertically and a column member configured to support the plurality of plate members.

14. The substrate processing apparatus according to claim 12 , further comprising an insulating ring installed to surround a side portion of the lower insulating part and made of a material having a thermal conductivity lower than that of the first heat exchanger.

15. A substrate processing apparatus comprising:

a process chamber configured to process a plurality of substrates vertically stacked at predetermined intervals;

a substrate retainer configured to hold the plurality of substrates in the process chamber;

a first heat exchanger installed in the process chamber to support the substrate retainer from a lower portion of the substrate retainer, and configured to perform a heat exchange with a gas flowing in a downward direction from a side of the substrate retainer in the process chamber; and

an induction heating part installed outside the process chamber and disposed to correspond to at least a periphery of a region where the plurality of substrates are stacked,

wherein at least a portion of the first heat exchanger is disposed to overlap with a lower end of the induction heating part,

the first heat exchanger includes a hollow cylindrical insulating tube vertically extending in the downward direction and an insulating plate installed in the insulating tube, and

regions in the insulating tube over and under the insulating plate are spatially connected to each other.