Patent Assignment
Reel/Frame 026948/0374
Assignment of Assignor's Interest
Recorded: 2011-09-22
Pages: 3
Assignors
SHIRAKO, KENJI
Executed: 2011-09-16
YAMAGUCHI, TAKATOMO
Executed: 2011-09-16
SAIDO, SHUHEI
Executed: 2011-09-16
SATO, AKIHIRO
Executed: 2011-09-16
Assignee
HITACHI KOKUSAI ELECTRIC INC.
14-1, SOTOKANDA 4-CHOME, CHIYODA-KU, TOYKO, 1018980, JAPAN
Covered Property
(1)
Substrate Processing Apparatus and Method of Manufacturing Semiconductor Device
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.