Method of manufacturing semiconductor device
A method of manufacturing a semiconductor device includes forming a first insulating film as a portion of a laminated insulating film on a substrate in which a plurality of circuit configurations is formed; polishing the first insulating film; measuring a film thickness distribution of the first insulating film; and forming a second insulating film as a portion of the laminated insulating film on the polished first insulating film at a film thickness distribution differing from the film thickness distribution of the first insulating film to correct a film thickness of the laminated insulating film.
1. A method of manufacturing a semiconductor device, comprising:
forming a first insulating film as a portion of a laminated insulating film on a substrate in which a plurality of circuit configurations is formed;
polishing the first insulating film;
measuring a height distribution of the first insulating film,
wherein the height is measured from a surface of the substrate contacting the first insulating film to a top surface of the first insulating film; and
forming a second insulating film as a portion of the laminated insulating film on the polished first insulating film at a film thickness distribution differing from the height distribution of the first insulating film to correct a film thickness of the laminated insulating film, and thereby provide a uniform height of the laminated insulating film.
2. The method of claim 1 , further comprising:
forming a groove on the substrate by patterning the substrate after the act of forming the second insulating film; and
forming a first metal film in the groove after the act of patterning the substrate.
3. The method of claim 2 , further comprising:
forming a second metal film electrically connected to the first metal film, after the act of forming the first metal film.
4. The method of claim 1 , wherein in the act of forming the second insulating film, an exposure amount of a main component of a process gas per unit area of the substrate is made smaller on a peripheral surface of the substrate than on a central surface of the substrate, when the height distribution of the first insulating film is such that the height is larger on the peripheral surface than on the central surface.
5. The method of claim 4 , further comprising:
forming a groove on the substrate by patterning the substrate after the act of forming the second insulating film; and
forming a first metal film in the groove after the act of patterning the substrate.
6. The method of claim 5 , further comprising:
forming a second metal film electrically connected to the first metal film, after the act of forming the first metal film.
7. The method of claim 1 , wherein in the act of forming the second insulating film, an amount of a process gas supplied to a peripheral surface of the substrate is made smaller than an amount of a process gas supplied to a central surface of the substrate, when the height distribution of the first insulating film is such that the height is larger on the peripheral surface than on the central surface.
8. The method of claim 1 , wherein in the act of forming the second insulating film, a concentration of a main component of a process gas supplied to a peripheral surface of the substrate is made smaller than a concentration of a main component of a process gas supplied to a central surface of the substrate, when the height distribution of the first insulating film is such that the height is larger on the peripheral surface than on the central surface.
9. The method of claim 8 , wherein when controlling the concentration of the process gas, a supply amount of an inert gas added to the process gas supplied to the peripheral surface is made larger than a supply amount of an inert gas added to the process gas supplied to the central surface.
10. The method of claim 1 , wherein in the act of forming the second insulating film, a temperature of a central surface of the substrate is made higher than a temperature of a peripheral surface of the substrate, when the height distribution of the first insulating film is such that the height is larger on the peripheral surface than on the central surface.
11. The method of claim 1 , wherein in the act of forming the second insulating film, an exposure amount of a main component of a process gas per unit area of the substrate is made larger on a peripheral surface of the substrate than on a central surface of the substrate, when the height distribution of the first insulating film is such that the height is smaller on the peripheral surface than on the central surface.
12. The method of claim 11 , further comprising:
forming a groove on the substrate by patterning the substrate after the act of forming the second insulating film; and
forming a first metal film in the groove after the act of patterning the substrate.
13. The method of claim 12 , further comprising:
forming a second metal film electrically connected to the first metal film, after the act of forming the first metal film.
14. The method of claim 1 , wherein in the act of forming the second insulating film, an amount of a process gas supplied to a peripheral surface of the substrate is made larger than an amount of a process gas supplied to a central surface of the substrate, when the height distribution of the first insulating film is such that the height is smaller on the peripheral surface than on the central surface.
15. The method of claim 1 , wherein in the act of forming the second insulating film, a concentration of a main component of a process gas supplied to a peripheral surface of the substrate is made larger than a concentration of a main component of a process gas supplied to a central surface of the substrate, when the height distribution of the first insulating film is such that the height is smaller on the peripheral surface than on the central surface.
16. The method of claim 15 , wherein when controlling the concentration of the process gas, a supply amount of an inert gas added to the process gas supplied to the central surface is made larger than a supply amount of an inert gas added to the process gas supplied to the peripheral surface.
17. The method of claim 1 , wherein in the act of forming the second insulating film, a temperature of the peripheral surface of the substrate is made higher than a temperature of the central surface of the substrate, when the height distribution of the first insulating film is such that the height is smaller on a peripheral surface of the substrate than on a central surface of the substrate.
18. A method of manufacturing a semiconductor device, comprising forming a second insulating film on a substrate in which a plurality of circuit configurations and a polished first insulating film as a portion of a laminated insulating film are formed,
wherein the second insulating film is formed as a portion of the laminated insulating film on a first insulating film at a film thickness distribution differing from a height distribution of the first insulating film to correct a film thickness of the laminated insulating film, and thereby provide a uniform height of the laminated insulating film, and
wherein the height is measured from a surface of the substrate contacting the first insulating film to a top surface of the first insulating film.