Insulation structure and method of manufacturing semiconductor device
A heat insulation structure, which has a cylindrical side wall part formed in a multilayer structure, includes: a cooling gas supply port provided in an upper portion of a side wall outer layer disposed in an outer side of the side wall part; a cooling gas passage provided between a side wall inner layer disposed in an inner side of the side wall part and the side wall outer layer; a space provided in an inner side of the side wall inner layer; a plurality of blowout holes provided in the side wall inner layer for distributing cooling gas from the cooling gas passage to the space; a buffer area continuously provided in the cooling gas supply port and the cooling gas passage; and a throttle part configured to reduce a cross-sectional area of a boundary surface between the buffer area and the cooling gas passage.
1. A heat insulation structure, which has a cylindrical side wall part formed in a multilayer structure, the heat insulation structure comprising:
a cooling gas supply port provided in an upper portion of a side wall outer layer disposed in an outer side of the side wall part;
a cooling gas passage provided between a side wall inner layer disposed in an inner side of the side wall part and the side wall outer layer;
a space provided in an inner side of the side wall inner layer;
a plurality of blowout holes provided in the side wall inner layer for distributing cooling gas from the cooling gas passage to the space;
a buffer area continuously provided in the cooling gas supply port and the cooling gas passage; and
a throttle part configured to reduce a cross-sectional area of a boundary surface between the buffer area and the cooling gas passage.
2. The heat insulation structure according to claim 1 , wherein the throttle part includes a plurality of throttle parts equally disposed in a circumferential direction.
3. The heat insulation structure according to claim 1 , wherein a plurality of partition walls is provided between the side wall outer layer and the side wall inner layer in a circumferential direction, and reduces a cross-sectional area of a plurality of cooling gas passages partitioned by the plurality of partition walls.
4. The heat insulation structure according to claim 3 , wherein a cross-sectional area of the throttle part is formed to be smaller than a cross-sectional area of each of the plurality of cooling gas passages.
5. The heat insulation structure according to claim 1 , wherein the throttle part includes at least two throttle parts provided in a vertical direction.
6. The heat insulation structure according to claim 5 , wherein the throttle part includes a first throttle part and a second throttle part, and a cross-sectional area of the first throttle part is smaller than a cross-sectional area of the second throttle part.
7. The heat insulation structure according to claim 6 , wherein the first throttle part is provided above a blowout hole disposed at the top, and the second throttle part is provided below a blowout hole disposed at the bottom.
8. The heat insulation structure according to claim 1 , wherein a cooling gas outlet port is provided in a lower portion of a side wall outer layer disposed in an outer side of a plurality of layers of the side wall part, and a second throttle part is provided in a boundary between the cooling gas outlet port and the cooling gas passage and reduces a cross-sectional area of the cooling gas outlet port.
9. The heat insulation structure according to claim 1 , wherein a valve is provided in the vicinity of at least each throttle part, and the valve is opened and closed according to a temperature control state or mode.
10. The heat insulation structure according to claim 1 , wherein a buffer area is provided to distribute cooling gas flowing through the cooling gas passage.
11. The heat insulation structure according to claim 1 , wherein an exhaust fan is provided to exhaust cooling gas flowing through the cooling gas passage.
12. A heating device comprising:
a heat insulation structure of claim 1 ; and
a heat generation part.
13. A substrate processing apparatus comprising:
a heating device of claim 12 .
14. A heat insulation structure, which has a cylindrical side wall part formed in a multilayer structure, the heat insulation structure comprising:
a cooling gas supply port provided in an upper portion of a side wall outer layer disposed in an outer side of the side wall part;
a cooling gas passage provided between a side wall inner layer disposed in an inner side of the side wall part and the side wall outer layer;
a cooling gas outlet port provided in a lower portion of the side wall outer layer disposed in the outer side of the side wall part;
a buffer area provided on both ends of the cooling gas passage; and
a throttle part configured to reduce a cross-sectional area of a boundary surface disposed in a boundary between the buffer area and the cooling gas passage.
15. The heat insulation structure according to claim 14 , wherein a plurality of partition walls is provided between the side wall outer layer and the side wall inner layer in a circumferential direction, and reduces a cross-sectional area of a plurality of cooling gas passages partitioned by the plurality of partition walls.
16. The heat insulation structure according to claim 15 , wherein a cross-sectional area of the throttle part is smaller than a cross-sectional area of each of the plurality of cooling gas passages.
17. The heat insulation structure according to claim 16 , wherein the first throttle part is provided above a blowout hole disposed at the top, and the second throttle part is provided below a blowout hole disposed at the bottom.
18. A heating device comprising:
a heat insulation structure of claim 14 ; and
a heat generation part.
19. A substrate processing apparatus comprising:
a heating device of claim 18 .
20. A method for manufacturing a semiconductor device, comprising:
loading a substrate into a reaction tube;
processing the substrate inside the reaction tube; and,
after the processing, cooling the reaction tube disposed in a space provided in an inner side of the side wall inner layer, by distributing cooling gas, the cooling gas being supplied from a cooling gas supply port disposed in an upper portion of a side wall outer layer disposed in an outer side of a side wall part of a heat insulation structure having the cylindrical side wall part formed in a multilayer structure, from a plurality of blowout holes to the space provided in the inner side of the side wall inner layer, through a cooling gas passage provided between a side wall inner layer disposed in an inner side of the side wall part and the side wall outer layer, a buffer area continuously provided in the cooling gas supply port and the cooling gas passage, and a throttle part configured to reduce a cross-sectional area of a boundary surface disposed in a boundary between the buffer area and the cooling gas passage.