Patent Assignment
Reel/Frame 026523/0375
Assignment of Assignor's Interest
Recorded: 2011-06-29
Pages: 4
Assignor
KAMEDA, KENJI
Executed: 2011-04-27
Assignees
HITACHI KOKUSAI ELECTRIC INC.
14-1, SOTOKANDA 4-CHOME, CHIYODA-KU, TOKYO, 1018980, JAPAN
L'AIR LIQUIDE SOCIETE ANONYME POUR L'ETUDE ET L'EXPLOITATION DES PROCEDES GEORGES CLAUDE
75 QUAI D'ORSAY, PARIS, 75321, FRANCE
Covered Property
(1)
Substrate Processing Apparatus, Method of Manufacturing Semiconductor Device and Method of Cleaning Processing Vessel
Related Assignments
(3)
Other recorded transfers of the patent in this record — the chain of ownership.
Assignment of Assignor's Interest
Jun 29, 2011
From: SONOBE, JUN; TADAKI, YUDAI
To: HITACHI KOKUSAI ELECTRIC INC.; L'AIR LIQUIDE SOCIETE ANONYME POUR L'ETUDE ET L'EXPLOITATION DES PROCEDES GEORGES CLAUDE
Reel/Frame 026523/0546 →
Assignment of Assignor's Interest
Aug 10, 2016
From: L'AIR LIQUIDE SOCIETE ANONYME POUR L'ETUDE ET L'EXPLOITATION DES PROCEDES GEORGES CLAUDE
To: HITACHI KOKUSAI ELECTRIC INC.
Reel/Frame 039397/0578 →
Assignment of Assignor's Interest
Dec 31, 2018
From: HITACHI KOKUSAI ELECTRIC INC.
To: KOKUSAI ELECTRIC CORPORATION
Reel/Frame 047995/0490 →