Patent Assignment
Reel/Frame 026068/0554
Assignment of Assignor's Interest
Recorded: 2011-04-04
Pages: 3
Assignors
SAITO, TATSUYUKI
Executed: 2011-01-31
SAKAI, MASANORI
Executed: 2011-01-31
KAGA, YUKINAO
Executed: 2011-01-31
YOKOGAWA, TAKASHI
Executed: 2011-01-31
Assignee
HITACHI KOKUSAI ELECTRIC INC.
14-1, SOTOKANDA 4-CHOME, CHIYODA-KU, TOKYO, 1018980, JAPAN
Covered Property
(1)
Substrate Processing Apparatus and Method of Manufacturing Semiconductor Device
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.