Heat treatment apparatus and method of manufacturing semiconductor device
A heat treatment apparatus capable of achieving high-accuracy processing and high safety and a method of manufacturing a substrate are provided. The heat treatment apparatus 10 includes a reaction tube 42 for processing a substrate, a manifold 44 for supporting the reaction tube 42 , a heater 46 installed around the reaction tube 42 to heat an inner part of the reaction tube 42 , a surrounding member 500 installed to surround a side portion of the reaction tube 42 arranged in a lower portion than the heater 46 ; an exhaust device 301 for forcibly exhausting a gap 506 between the surrounding member 500 and the reaction tube 42 ; and a sealing member 150 installed in a contacting portion between the reaction tube 42 and the manifold 44 . Here, an inlet hole 501 through which the exhaust device inhales an atmosphere outside the surrounding member 500 to the gap 506 is installed in the surrounding member 500.
1. A heat treatment apparatus comprising:
a reaction tube configured to process a substrate;
a manifold supporting the reaction tube;
a heater configured to heat the reaction tube and surrounding an upper portion of the reaction tube;
a surrounding member disposed below the heater and surrounding a lower portion of the reaction tube
with a gap therebetween, the surrounding member comprising a plurality of inlet holes disposed at a side surface thereof;
an exhaust device configured to exhaust the gap such that air outside the surrounding member flows into the gap through the inlet holes and then flows out of the gap through an exhaust pipe; and
a sealing member disposed at a contacting portion between the reaction tube and the manifold.
2. The heat treatment apparatus according to claim 1 , further comprising the exhaust pipe connecting the surrounding member and the exhaust device.
3. The heat treatment apparatus according to claim 1 , further comprising a first heat blocking member disposed between the heater and the surrounding member.
4. The heat treatment apparatus according to claim 3 , further comprising a second heat blocking member disposed between the heater and the first heat blocking member.
5. The heat treatment apparatus according to claim 1 , wherein the surrounding member further comprises an exhaust port disposed at the side surface thereof,
wherein the plurality of inlet holes are arranged in a circumferential direction in a manner that number of the inlet holes located higher than the exhaust port is greater than number of the inlet holes located lower than the exhaust port, and
wherein the exhaust device draws the air outside the surrounding member into the gap through the plurality of inlet holes.
6. A heat treatment apparatus comprising:
a reaction tube configured to process a substrate;
a manifold supporting the reaction tube;
a heater configured to heat the reaction tube and surrounding an upper portion of the reaction tube;
a surrounding member surrounding a side portion of the reaction tube below the heater;
an exhaust device configured to exhaust a gap between the surrounding member and the reaction tube; and
a sealing member disposed at a contacting portion between the reaction tube and the manifold,
wherein the surrounding member comprises an exhaust port and a plurality of inlet holes disposed at a side surface thereof, the plurality of inlet holes being arranged in a circumferential direction in a manner that number of the inlet holes located higher than the exhaust port is greater than number of the inlet holes located lower than the exhaust port, and
wherein the exhaust device draws an air outside the surrounding member into the gap through the plurality of inlet holes.