Substrate processing apparatus and heating equipment
A substrate processing apparatus includes a heating part including a cylindrical-shaped heat insulator and a heating wire arranged on the inner circumferential surface of the heat insulator, a heat-insulating part configured to define a cylindrical space between the heating part and the heat insulating part, a cooling gas introduction portion coupled to the cylindrical space and provided above the heat-insulating part to surround the heating part, and a cooling gas discharge portion provided at an approximately same height as that of the cooling gas introduction portion in the diameter direction extending from approximately the center of the cooling gas introduction portion.
1. A substrate processing apparatus, comprising:
a heating part including a heating wire arranged on the inner circumferential surface of a cylindrical-shaped heat insulator;
a heat-insulating part spaced apart from the heating part to form a cylindrical space that is provided outside the heating part and inside the heat-insulating part;
a top plate provided above the heating part and the heat-insulating part;
a cooling gas introduction portion formed inside the top plate at a top of the heat-insulating part to surround an upper portion of the heating part, wherein an inner circumferential surface of the cooling gas introduction portion is formed at an outer position from an inner circumferential surface of the cylindrical space;
a passage opening and a passage hole are provided below the cooling gas introduction portion to couple the cooling gas introduction portion and the cylindrical space, wherein the passage hole is inclined inwardly to connect the passage opening and the cylindrical space;
a cooling gas discharge portion including a gas flow passage horizontally extending from the center of the top plate to a side surface of the top plate; and
a plurality of gas outlets which allow the cylindrical space to be in communication with an inner space from the heating wire;
wherein the cooling gas introduction portion and the cooling gas discharge portion are vertically aligned such that a horizontal plane passes through the cooling gas introduction portion and the cooling gas discharge portion.
2. The apparatus of claim 1 , further comprising: a cooling gas introducing inlet configured to introduce cooling gas into the cooling gas introduction portion therethrough,
wherein the cooling gas discharge portion includes a cooling gas discharge outlet configured to discharge the cooling gas introduced into the cooling gas introduction portion to an exterior of the substrate processing apparatus,
wherein the cooling gas introducing inlet and the cooling gas discharge outlet are provided outside a heating region above the heating part.
3. The apparatus of claim 2 , wherein the cooling gas introducing inlet and the cooling gas discharge outlet are provided in the top plate.
4. The substrate processing apparatus of claim 1 , wherein the top plate includes:
a lower heating-insulating plate provided to abut against the upper end of the heating part and including a flow hole formed at the center of the lower heating-insulating plate; and
a upper heating-insulating plate provided on the lower heating-insulating plate and including a groove horizontally extending from a center corresponding to the flow hole to a sidewall surface.
5. A heating equipment, comprising:
a heating part including a heating wire arranged on the inner circumferential surface of a cylindrical-shaped heat insulator;
a heat-insulating part spaced apart from the heating part to form a cylindrical space that is provided outside the heating part and inside the heat-insulating part;
a top plate provided above the heating part and the heat-insulating part;
a cooling gas introduction portion formed inside the top plate at a top of the heat-insulating part to surround an upper portion of the heating part, wherein an inner circumferential surface of the cooling gas introduction portion is formed at an outer position from an inner circumferential surface of the cylindrical space; a passage opening and a passage hole are provided below the cooling gas introduction portion to couple the cooling gas introduction portion and the cylindrical space, wherein the passage hole is inclined inwardly to connect the passage opening and the cylindrical space;
a cooling gas discharge portion including a gas flow passage horizontally extending from the center of the top plate to a side surface of the top plate; and
a plurality of gas outlets which allow the cylindrical space to be in communication with an inner space from the heating wire;
wherein the cooling gas introduction portion and the cooling gas discharge portion are vertically aligned such that a horizontal plane passes through the cooling gas introduction portion and the cooling gas discharge portion.
6. The equipment of claim 5 , further comprising: a cooling gas introducing inlet configured to introduce cooling gas into the cooling gas introduction portion therethrough,
wherein the cooling gas discharge portion includes a cooling gas discharge outlet configured to discharge the cooling gas introduced into the cooling gas introduction portion to an exterior of the heating equipment,
wherein the cooling gas introducing inlet and the cooling gas discharge outlet are provided outside a heating region above the heating part.
7. The heating equipment of claim 6 , wherein the cooling gas introducing inlet and the cooling gas discharge outlet are provided in the top plate.
8. The heating equipment of claim 5 , wherein the top plate includes:
a lower heating-insulating plate provided to abut against the upper end of the heating part and including a flow hole formed at the center of the lower heating-insulating plate; and
a upper heating-insulating plate provided on the lower heating-insulating plate and including a groove horizontally extending from a center corresponding to the flow hole to a sidewall surface.