Patent Assignment
Reel/Frame 026522/0957
Assignment of Assignor's Interest
Recorded: 2011-06-29
Pages: 4
Assignors
HIROSE, YOSHIRO
Executed: 2011-04-21
TAKASAWA, YUSHIN
Executed: 2011-04-21
KAMAKURA, TSUKASA
Executed: 2011-04-21
NAKAMURA, YOSHINOBU
Executed: 2011-04-21
SASAJIMA, RYOTA
Executed: 2011-04-21
Assignee
HITACHI KOKUSAI ELECTRIC INC.
14-1, SOTOKANDA 4-CHOME, CHIYODA-KU, TOKYO, 1018980, JAPAN
Covered Property
(1)
Method of Manufacturing Semiconductor Device, Method of Processing Substrate and Substrate Processing Apparatus
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.