Patent Assignment
Reel/Frame 026887/0229
Assignment of Assignor's Interest
Recorded: 2011-09-12
Pages: 5
Assignors
AKAE, NAONORI
Executed: 2011-06-10
HIROSE, YOSHIRO
Executed: 2011-06-10
MURAKAMI, KOTARO
Executed: 2011-06-14
Assignee
HITACHI KOKUSAI ELECTRIC INC.
14-1, SOTOKANDA 4-CHOME, CHIYODA-KU, TOKYO, 1018980, JAPAN
Covered Property
(1)
Method of Manufacturing a Semiconductor Device, Method of Cleaning a Process Vessel, and Substrate Processing Apparatus
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.