Semiconductor device manufacturing method and substrate processing method including a cleaning method
A semiconductor device manufacturing method includes: a step wherein a processing substrate to be processed is placed on a substrate mounting member that is provided in a processing chamber having a plurality of gas supply regions; a film-forming step wherein a processing gas is supplied to the processing chamber, and the substrate is processed; a step wherein the substrate is carried out from the processing chamber; and a cleaning step wherein the density of the cleaning gas is controlled, while controlling cleaning gas quantities in the gas supply regions, respectively, in a state wherein the substrate is not placed in the processing chamber.
1. A method of manufacturing a semiconductor device, the method comprising:
mounting a processing substrate on a substrate mounting table member installed in a processing chamber that has a plurality of gas supply regions including a first processing region, a second processing region, a first purge region, and a second purge region, the first and second purge regions arranged between the first and second processing regions, wherein the plurality of gas supply regions are arranged radially with respect to a center of the processing chamber;
forming a film on the processing substrate by simultaneously supplying a first processing gas from a first processing as supply unit to the first processing region and a second processing gas from a second processing gas supply unit to the second processing region;
unloading the processing substrate from the processing chamber; and
performing cleaning by simultaneously supplying an inert gas from a plurality of inert gas supply units to each of the plurality of gas supply regions and a cleaning gas from a cleaning gas supply unit different from the first and second processing gas supply units to all of the plurality of gas supply regions, independently controlling a flow rate of the inert gas supplied from each of the plurality of inert gas supply units to each of the plurality of gas supply regions, and controlling a density of the cleaning gas in each of the plurality of gas supply regions.
2. The method of claim 1 ,
wherein, in the act of performing cleaning, supply of an inert gas is controlled such that a flow rate of the inert gas supplied to the first and second purge regions is larger than a flow rate of the inert gas supplied to the first processing region.
3. The method of claim 1 , wherein the first processing gas has a higher viscosity than that of the second processing gas, and wherein the supply of the inert gas is controlled such that a density of the cleaning gas in the first processing region is larger than a density of the cleaning gas in the second processing region.
4. The method of claim 1 , wherein the act of performing cleaning includes passing a surface of the substrate mounting table member through the first processing region, the second processing region, the first purge region, and the second purge region, when the substrate mounting table member is rotated.
5. The method of claim 1 , wherein the cleaning gas is supplied from the cleaning gas supply unit to the plurality of gas supply regions through a cleaning gas supply hole located at the center of the processing chamber.
6. A substrate processing method, the method comprising:
mounting a processing substrate on a substrate mounting table member installed in a processing chamber having a plurality of gas supply regions including a first processing region, a second processing region, a first purge region, and a second purge region, the first and second purge regions arranged between the first and second processing regions, wherein the plurality of gas supply regions are arranged radially with respect to a center of the processing chamber;
forming a film on the processing substrate by simultaneously supplying a first processing gas from a first processing gas supply unit to the first processing region and a second processing gas from a second processing gas supply unit to the second processing region;
unloading the processing substrate from the processing chamber; and
performing cleaning by simultaneously supplying an inert gas from a plurality of inert gas supply units to each of the plurality of gas supply regions and a cleaning gas from a cleaning gas supply unit different from the first and second processing as supply units to all of the plurality of gas supply regions, independently controlling a flow rate of the inert gas supplied from each of the plurality of inert gas supply units to each of the plurality of gas supply regions, and controlling a density of the cleaning gas in each of the plurality of gas supply regions.
7. The substrate processing method of claim 6 , wherein the cleaning gas is supplied from the cleaning gas supply unit to the plurality of gas supply regions through a cleaning gas supply hole located at the center of the processing chamber.