Patent Assignment
Reel/Frame 033819/0451
Assignment of Assignor's Interest
Recorded: 2014-09-25
Pages: 5
Assignee
HITACHI KOKUSAI ELECTRIC INC.
14-1, SOTOKANDA 4-CHOME, CHIYODA-KU, TOKYO, 101-8980, JAPAN
Covered Property
(1)
Semiconductor Device Manufacturing Method and Substrate Processing Method Including a Cleaning Method
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.