Patent Assignment
Reel/Frame 025991/0570
Assignment of Assignor's Interest
Recorded: 2011-03-21
Pages: 4
Assignors
KAGA, YUKINAO
Executed: 2011-01-27
SAITO, TATSUYUKI
Executed: 2011-01-27
SAKAI, MASANORI
Executed: 2011-01-27
YOKOGAWA, TAKASHI
Executed: 2011-01-27
Assignee
HITACHI KOKUSAI ELECTRIC INC.
14-1, SOTOKANDA 4-CHOME, CHIYODA-KU, TOKYO, 1018980, JAPAN
Covered Property
(1)
Method of Manufacturing Semiconductor Device and Substrate Processing Apparatus
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.