Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium

1. A method of manufacturing a semiconductor device, the method comprising forming a thin film having a borazine ring skeleton and containing a predetermined element, boron, carbon, and nitrogen on a substrate by performing a cycle a first predetermined number of times, the cycle comprising:

supplying a precursor gas containing the predetermined element and a halogen element to the substrate;

supplying a reaction gas including an organic borazine compound to the substrate; and

supplying a carbon-containing gas to the substrate, the carbon-containing gas including a hydrocarbon-based gas,

wherein the cycle is performed under a condition in which the borazine ring skeleton in the organic borazine compound is maintained.

2. The method of claim 1 , wherein the act of supplying the carbon-containing gas is performed in a period in which the reaction gas is supplied.

3. The method of claim 1 , wherein the act of supplying the carbon-containing gas is performed in a period in which supply of the reaction gas is halted.

4. The method of claim 1 , wherein the act of supplying the precursor gas and the act of supplying the reaction gas are alternately performed a second predetermined number of times.

5. The method of claim 1 , wherein the cycle further comprises supplying a nitriding gas to the substrate.

6. The method of claim 5 , wherein the cycle comprises: alternately performing the act of supplying the precursor gas and the act of supplying the reaction gas a second predetermined number of times; and performing the act of supplying the nitriding gas.

7. The method of claim 5 , wherein in the act of supplying the nitriding gas, the nitriding gas activated by heat is supplied to the substrate.

8. The method of claim 5 , wherein in the act of supplying the nitriding gas, the nitriding gas activated by plasma is supplied to the substrate.

9. The method of claim 1 , wherein the cycle further comprises supplying a gas containing nitrogen and carbon to the substrate.

10. The method of claim 9 , wherein the cycle comprises: alternately performing the act of supplying the precursor gas and the act of supplying the reaction gas a second predetermined number of times; and performing the act of supplying the gas containing nitrogen and carbon.

11. The method of claim 9 , wherein the gas containing nitrogen and carbon includes at least one selected from the group consisting of an amine-based gas and an organic hydrazine-based gas.

12. A method of manufacturing a semiconductor device, the method comprising forming a thin film having a borazine ring skeleton and containing a predetermined element, boron, carbon, and nitrogen on a substrate by performing a cycle a predetermined number of times, the cycle comprising:

supplying a precursor gas containing the predetermined element and a halogen element to the substrate, the predetermined element including silicon or a metal element, and the halogen element including chlorine or fluorine;

supplying a reaction gas including an organic borazine compound to the substrate; and

supplying a carbon-containing gas to the substrate,

wherein the cycle is performed under a condition in which the borazine ring skeleton in the organic borazine compound is maintained.

13. A method of manufacturing a semiconductor device, the method comprising forming a thin film having a borazine ring skeleton and containing a predetermined element, boron, carbon, and nitrogen on a substrate by performing a cycle a predetermined number of times, the cycle comprising:

supplying a precursor gas containing the predetermined element and a halogen element to the substrate,

supplying a reaction gas including an organic borazine compound to the substrate; and

supplying a carbon-containing gas to the substrate,

wherein the cycle is performed under a condition in which the borazine ring skeleton in the organic borazine compound is maintained and under a non-plasma condition.