Patent Assignment
Reel/Frame 032357/0178
Assignment of Assignor's Interest
Recorded: 2014-03-05
Pages: 7
Assignors
HIROSE, YOSHIRO
Executed: 2014-02-25
YAMAMOTO, RYUJI
Executed: 2014-02-26
SANO, ATSUSHI
Executed: 2014-02-25
Assignee
HITACHI KOKUSAI ELECTRIC INC.
14-1, SOTOKANDA 4-CHOME, CHIYODA-KU, TOKYO, 1018980, JAPAN
Covered Property
(1)
Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus, and Recording Medium
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.