Method of manufacturing a semiconductor device
A method of manufacturing a semiconductor device includes: forming a film on a substrate by time-divisionally and sequentially performing: (a) supplying a precursor gas to the substrate and causing precursor molecules, which are contained in the precursor gas and which contains a main element and ligands, to be adsorbed onto the substrate; (b) supplying a compound containing an electron withdrawing group to the substrate onto which the precursor molecules are adsorbed, and causing the compound containing the electron withdrawing group to be adsorbed to the ligands contained in the precursor molecules; and (c) supplying a reaction gas to the substrate onto which the precursor molecules and the compound containing the electron withdrawing group are adsorbed, causing the ligands and the compound containing the electron withdrawing group to be desorbed from the substrate, and causing the main element contained in the precursor molecules to react with the reaction gas.
1. A method of manufacturing a semiconductor device, comprising: forming a film on a substrate by time-divisionally and sequentially performing:
(a) supplying a compound having an electron donating group to the substrate;
(b) supplying a precursor gas to the substrate and causing precursor molecules, which are contained in the precursor gas and which contains a main element and ligands, to be adsorbed onto the substrate;
(c) supplying a compound containing an electron withdrawing group to the substrate onto which the precursor molecules are adsorbed, and causing the compound containing the electron withdrawing group to be adsorbed to the ligands contained in the precursor molecules; and
(d) supplying a reaction gas to the substrate onto which the precursor molecules and the compound containing the electron withdrawing group are adsorbed, causing the ligands and the compound containing the electron withdrawing group to be desorbed from the substrate, and causing the main element contained in the precursor molecules to react with the reaction gas.
2. The method of claim 1 , wherein the compound containing the electron withdrawing group is one of a Lewis acid gas containing at least one compound selected from a group consisting of a boron-containing halide (BX 3 (X=F, I or Br)), a hydrogen-containing halide (HX (X=F, Cl, Br or I)), a silicon-containing halide (SiX 4 (X=F, Cl, Br or I)) as a halide, an aluminum-containing halide (AlX 3 (X=F, Cl, I or Br)), a titanium-containing halide (TiX 4 (X=F, Cl, Br or I)) as a metal-containing halide, other halide such as CX 4 (X=F, Cl, Br or I) or the like, a diborane (B 2 H 6 ), a compound having a nitro group (—NO 2 ), and a gas containing at least one compound selected from a group consisting of BCl 3 , B 2 H 6 and AlCl 3 .
3. The method of claim 1 , wherein the precursor gas contains a metal element, and the film is a metal-containing film.
4. The method of claim 1 , wherein the precursor gas includes an amine-based precursor gas as an organic precursor gas.
5. The method of claim 1 , wherein the steps (a) to (d) are sequentially and repeatedly performed multiple times.
6. The method of claim 1 , further comprising: after the step (b), exhausting the precursor gas.
7. The method of claim 1 , wherein each of the steps are performed under a non-plasma condition.
8. The method of claim 1 , wherein the compound having the electron donating group is one of pyridine, pyrimidine and picoline.
9. The method of claim 8 , wherein the steps (a), (b), (c) and (d) are repeatedly performed multiple times in the named order.
10. The method of claim 8 , further comprising: after the step (a) or the step (c), exhausting the compound having the electron withdrawing group or the compound having the electron donating group.