Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium
A method of manufacturing a semiconductor device includes forming a thin film containing a specific element, oxygen, carbon, and nitrogen by performing a cycle a predetermined number of times. The cycle includes supplying a specific element-containing gas, supplying a carbon-containing gas, supplying an oxidizing gas, and supplying a nitriding gas. The act of supplying the nitriding gas is performed before the act of supplying the specific element-containing gas, and the act of supplying the carbon-containing gas and the act of supplying the oxidizing gas are not performed until the act of supplying the specific element-containing gas is performed.
1. A method of manufacturing a semiconductor device, comprising:
(a) modifying an outermost surface of a substrate by supplying a nitriding gas to the substrate; and
(b) forming a thin film containing a specific element, oxygen, carbon, and nitrogen on the modified outermost surface of the substrate by performing a cycle one or more times, the cycle comprising sequentially performing:
(b-1) supplying a specific element-containing gas to the substrate;
(b-2) supplying a carbon-containing gas to the substrate;
(b-3) supplying an oxidizing gas to the substrate; and
(b-4) supplying a nitriding gas to the substrate.
2. The method of claim 1 , wherein, in the step (a), the outermost surface of the substrate is nitrided, or the nitriding gas is adsorbed onto the outermost surface of the substrate, or the outermost surface of the substrate is nitrided and the nitriding gas is adsorbed onto the outermost surface of the substrate at the same time.
3. The method of claim 1 , wherein, in the step (a), a nitride layer is formed on the outermost surface of the substrate, or an adsorption layer of the nitriding gas is formed on the outermost surface of the substrate, or the nitride layer and the adsorption layer are formed on the outermost surface of the substrate.
4. The method of claim 1 , wherein, in the step (b-1), a specific element-containing layer containing the specific element is formed on the modified outermost surface of the substrate.
5. The method of claim 1 , wherein
a specific element-containing layer containing the specific element is formed on the modified outermost surface of the substrate in the step (b-1);
a carbon-containing layer is formed on the specific element-containing layer in the step (b-2),
a layer in which the carbon-containing layer is formed on the specific element-containing layer is oxidized to form a layer containing the specific element, oxygen, and carbon in the step (b-3); and
the layer containing the specific element, oxygen, and carbon is nitrided to form a layer containing the specific element, oxygen, carbon, and nitrogen in the step (b-4).
6. The method of claim 1 , wherein a time for supplying the nitriding gas in the step (a) is set to be longer than a time for supplying the nitriding gas in the step (b-4).
7. The method of claim 1 , wherein the specific element is a semiconductor element or a metal element.
8. The method of claim 1 , wherein the specific element is silicon.
9. A substrate processing apparatus comprising:
a process chamber configured to accommodate a substrate;
a specific element-containing gas supply system configured to supply a specific element-containing gas to the substrate in the process chamber;
a carbon-containing gas supply system configured to supply a carbon-containing gas to the substrate in the process chamber;
an oxidizing gas supply system configured to supply an oxidizing gas to the substrate in the process chamber;
a nitriding gas supply system configured to supply a nitriding gas to the substrate in the process chamber; and
a controller configured to control the specific element-containing gas supply system, the carbon-containing gas supply system, the oxidizing gas supply system, and the nitriding gas supply system such that a process of modifying an outermost surface of the substrate by supplying the nitriding gas to the substrate is performed and a process of forming a thin film containing a specific element, oxygen, carbon and nitrogen on the modified outermost surface of the substrate is performed by performing a cycle one or more times, the cycle comprising sequentially performing: supplying the specific element-containing gas to the substrate; supplying the carbon-containing gas to the substrate; supplying the oxidizing gas to the substrate; and supplying the nitriding gas to the substrate.
10. A non-transitory computer-readable recording medium storing a program that causes a computer to perform a process of modifying an outermost surface of a substrate by supplying a nitriding gas to the substrate in a process chamber and a process of forming a thin film containing a specific element, oxygen, carbon, and nitrogen on the modified outermost surface of the substrate by performing a cycle one or more times, the cycle comprising sequentially performing:
supplying a specific element-containing gas to the substrate in the process chamber;
supplying a carbon-containing gas to the substrate in the process chamber;
supplying an oxidizing gas to the substrate in the process chamber; and
supplying a nitriding gas to the substrate in the process chamber.