Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium
A method of manufacturing a semiconductor device includes forming a thin film containing a specific element, oxygen, carbon, and nitrogen by performing a cycle a predetermined number of times. The cycle includes supplying a specific element-containing gas, supplying a carbon-containing gas, supplying an oxidizing gas, and supplying a nitriding gas. The act of supplying the nitriding gas is performed before the act of supplying the specific element-containing gas, and the act of supplying the carbon-containing gas and the act of supplying the oxidizing gas are not performed until the act of supplying the specific element-containing gas is performed.
1. A method of manufacturing a semiconductor device, comprising forming a thin film containing a specific element, oxygen, carbon, and nitrogen on a substrate by performing a cycle a predetermined number of times, the cycle comprising:
supplying a specific element-containing gas to the substrate;
supplying a carbon-containing gas to the substrate;
supplying an oxidizing gas to the substrate; and
supplying a nitriding gas to the substrate,
wherein in the act of forming the thin film, the act of supplying the nitriding gas is performed before the act of supplying the specific element-containing gas, and the act of supplying the carbon-containing gas and the act of supplying the oxidizing gas are not performed until the act of supplying the specific element-containing gas is performed after the act of supplying the nitriding gas is performed.
2. The method of claim 1 , wherein in the act of forming the thin film,
the act of supplying the nitriding gas is performed, and the cycle comprising supplying the specific element-containing gas, supplying the carbon-containing gas, supplying the oxidizing gas, and supplying the nitriding gas is performed a predetermined number of times.
3. The method of claim 1 , wherein in the act of forming the thin film,
the act of supplying the nitriding gas is performed, and the cycle, in which the act of supplying the specific element-containing gas, the act of supplying the carbon-containing gas, the act of supplying the oxidizing gas, and the act of supplying the nitriding gas are sequentially performed, is performed a predetermined number of times.
4. The method of claim 1 , wherein in the act of forming the thin film,
the cycle comprising supplying the nitriding gas, supplying the specific element-containing gas, supplying the carbon-containing gas, and supplying the oxidizing gas is performed a predetermined number of times, and the act of supplying the nitriding gas is performed.
5. The method of claim 1 , wherein in the act of forming the thin film,
the cycle, in which the act of supplying the nitriding gas, the act of supplying the specific element-containing gas, the act of supplying the carbon-containing gas, and the act of supplying the oxidizing gas are sequentially performed, is performed a predetermined number of times, and the act of supplying the nitriding gas is performed.
6. The method of claim 1 , wherein in the act of forming the thin film,
an uppermost surface of the substrate is modified by supplying the nitriding gas, and
a specific element-containing layer containing the specific element is formed on the uppermost surface of the substrate modified by the nitriding gas by supplying the specific element-containing gas.
7. The method of claim 1 , wherein in the act of forming the thin film,
an uppermost surface of the substrate is modified by supplying the nitriding gas,
a specific element-containing layer containing the specific element is formed on the uppermost surface of the substrate modified by the nitriding gas by supplying the specific element-containing gas,
a carbon-containing layer is formed on the specific element-containing layer by supplying the carbon-containing gas,
a layer in which the carbon-containing layer is formed on the specific element-containing layer is oxidized by supplying the oxidizing gas to form a layer containing the specific element, oxygen, and carbon, and
the layer containing the specific element, oxygen, and carbon is nitrided by supplying the nitriding gas to form the layer containing the specific element, oxygen, carbon, and nitrogen, and an uppermost surface of the layer is modified.
8. The method of claim 6 , wherein when the uppermost surface of the substrate is modified by supplying the nitriding gas, the uppermost surface of the substrate is nitrided, or the nitriding gas is adsorbed onto the uppermost surface of the substrate.
9. The method of claim 1 , wherein the specific element is a semiconductor element or a metal element.
10. The method of claim 1 , wherein the specific element is silicon.
11. A substrate processing apparatus, comprising:
a processing chamber configured to accommodate a substrate;
a specific element-containing gas supply system configured to supply a specific element-containing gas to the substrate in the processing chamber;
a carbon-containing gas supply system configured to supply a carbon-containing gas to the substrate in the processing chamber;
an oxidizing gas supply system configured to supply an oxidizing gas to the substrate in the processing chamber;
a nitriding gas supply system configured to supply a nitriding gas to the substrate in the processing chamber; and
a controller configured to control the specific element-containing gas supply system, the carbon-containing gas supply system, the oxidizing gas supply system, and the nitriding gas supply system such that a thin film containing a specific element, oxygen, carbon, and nitrogen is formed on the substrate by performing a cycle a predetermined number of times, the cycle comprising supplying the specific element-containing gas to the substrate, supplying the carbon-containing gas to the substrate, supplying the oxidizing gas to the substrate, and supplying the nitriding gas to the substrate,
wherein in the act of forming the thin film, the act of supplying the nitriding gas is performed before the act of supplying the specific element-containing gas, and the act of supplying the carbon-containing gas and the act of supplying the oxidizing gas are not performed until the act of supplying the specific element-containing gas is performed after the act of supplying the nitriding gas is performed.
12. A non-transitory computer-readable recording medium storing a program that causes a computer to perform a process of forming a thin film containing a specific element, oxygen, carbon, and nitrogen on a substrate by performing a cycle a predetermined number of times, the cycle comprising:
supplying a specific element-containing gas to the substrate;
supplying a carbon-containing gas to the substrate;
supplying an oxidizing gas to the substrate; and
supplying a nitriding gas to the substrate,
wherein in the act of forming the thin film, the act of supplying the nitriding gas is performed before the act of supplying the specific element-containing gas, and the act of supplying the carbon-containing gas and the act of supplying the oxidizing gas are not performed until the act of supplying the specific element-containing gas is performed after the act of supplying the nitriding gas is performed.