Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium
A method of manufacturing a semiconductor device includes: providing a substrate; and forming a film on the substrate by supplying a silicon hydride and a halogen element-free catalyst containing one of a group III element or a group V element to the substrate, under a condition that the silicon hydride is not thermally decomposed when the silicon hydride is present alone.
1. A method of manufacturing a semiconductor device, comprising:
providing a substrate; and
forming a film on the substrate by supplying a silicon hydride and a halogen element-free catalyst containing one of a group III element or a group V element to the substrate, under a condition that the silicon hydride is not thermally decomposed when the silicon hydride is present alone,
wherein the catalyst comprises an alkyl group.
2. The method according to claim 1 , wherein the catalyst comprises a methyl group, an ethyl group, a propyl group, an isopropyl group, a butyl group, or an isobutyl group.
3. The method according to claim 1 , wherein the catalyst comprises an ethyl group.
4. The method according to claim 1 , wherein the catalyst comprises a material represented by at least one selected from a group consisting of general formulae of (CH 3 ) x BH 3-x , (C 2 H 5 ) x BH 3-x , (C 3 H 7 ) x BH 3-x , [(CH 3 ) 2 CH] x BH 3-x , (C 4 H 9 ) x BH 3-x , [(CH 3 ) 2 CHCH 2 ] x BH 3-x , (CH 3 ) x PH 3-x , (C 2 H 5 ) x PH 3-x , (C 3 H 7 ) x PH 3-x , [(CH 3 ) 2 CH] x PH 3-x , (C 4 H 9 ) x PH 3-x , [(CH 3 ) 2 CHCH 2 ] x PH 3-x , (CH 3 ) x NH 3-x , (C 2 H 5 ) x NH 3-x , (C 3 H 7 ) x NH 3-x , [(CH 3 ) 2 CH] x NH 3-x , (C 4 H 9 ) x NH 3-x , and [(CH 3 ) 2 CHCH 2 ] x NH 3-x , where x is an integer of 1 to 3.
5. The method according to claim 1 further comprising supplying an inert gas to the substrate, in the forming of the film, and controlling a concentration of an impurity incorporated into the film by a dilution rate of the catalyst by the inert gas.
6. The method according to claim 1 , wherein the catalyst is supplied first and then the silicon hydride is supplied in the forming of the film.
7. The method according to claim 1 further comprising, before performing the forming of the film, forming a seed layer on the substrate by supplying the silicon hydride to the substrate.
8. The method according to claim 7 , wherein an execution time of the forming of the seed layer is equal to or longer than an execution time of the forming of the film.
9. The method according to claim 7 , wherein an execution time of the forming of the seed layer is longer than an execution time of the forming of the film.
10. The method according to claim 7 , wherein a pressure of a space where the substrate is present in the forming of the seed layer is set to be equal to or greater than a pressure of the space where the substrate is present in the forming of the film.
11. The method according to claim 7 , wherein a pressure of a space where the substrate is present in the forming of the seed layer is set to be greater than a pressure of the space where the substrate is present in the forming of the film.
12. The method according to claim 7 further comprising supplying an inert gas to the substrate in the forming of the seed layer and in the forming of the film, wherein a dilution rate of the silicon hydride and the catalyst in the forming of the seed layer is set to be equal to or less than a dilution rate of the silicon hydride and the catalyst in the forming of the film.
13. The method according to claim 7 further comprising, supplying an inert gas to the substrate in the forming of the seed layer and in the forming of the film, wherein a dilution rate of the silicon hydride and the catalyst in the forming of the seed layer is set to be less than a dilution rate of the silicon hydride and the catalyst in the forming of the film.
14. The method according to claim 1 , wherein the silicon hydride comprises a material represented by a general formula of Si n H 2n+2 , wherein is an integer equal to or larger than 1.
15. The method according to claim 1 , wherein the silicon hydride comprises a material represented by a general formula of Si n H 2n+2 , wherein is an integer equal to or larger than 2.
16. A non-transitory computer-readable recording medium storing a program configured to cause a computer to perform a process in a substrate processing apparatus, the process comprising:
providing a substrate in a process chamber of the substrate processing apparatus; and
forming a film on the substrate in the process chamber by supplying a silicon hydride and a halogen element-free catalyst containing one of a group III element or a group V element to the substrate, under a condition that the silicon hydride is not thermally decomposed when the silicon hydride is present alone,
wherein the catalyst comprises an alkyl group.